Zobrazeno 1 - 3
of 3
pro vyhledávání: '"V. G. Huerta"'
Publikováno v:
Revista Argentina de Microbiología, Vol 42, Iss 1, Pp 79-79 (2010)
Externí odkaz:
https://doaj.org/article/98e45de238af4e8eab435658b185d39f
Publikováno v:
Journal of Microelectromechanical Systems. 21:100-109
In this paper, a thin-film packaging approach is developed. It is meant to provide microelectromechanical systems (MEMS) devices with hermetic encapsulation that is sufficiently strong for transfer molding. A flat slab structure supported by columns
Publikováno v:
Revista Argentina de microbiologia. 42(1)