Zobrazeno 1 - 10
of 19
pro vyhledávání: '"V. G. Beshenkov"'
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 13:941-945
The problem of diagnosing the elemental composition of PZT (lead zirconate titanate) films on platinum is solved by X-ray microprobe analysis. The resulting compositions differ markedly for thin (thickness of 300 nm, conventional for microelectronic
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:861-865
The problem concerning the diagnostics of the phase composition of lead-zirconate-titanate (PZT) films under conditions of overlapping Raman spectra is solved via applied mathematical statistics. The proposed phase-identification method based on refe
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:159-162
The problem of diagnostics of the phase composition of lead-zirconate-titanate (PZT) layers under conditions of overlapped Raman spectra is solved by means of applied mathematical statistics. The spectra measured on the surface of the multiphase mate
Publikováno v:
Technical Physics Letters. 40:644-647
The peculiarities of the growth of PZT films on heteroepitaxial Ir/YSZ/Si structures under conditions of cathode radio-frequency sputtering of a ceramic target in argon-oxygen mixtures have been studied. It is shown that sputtering in a gas mixture w
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 6:873-876
It is shown that film exfoliation in a PZT(400 nm)/Ir(50 nm)/TiO2(10 nm)/Ti(10 nm)/SiO2/Si system upon annealing in air at 650°C for 20 min occurs at the PZT/Ir interface along a thin intermediate oxide layer (Pb, Ir)O x containing a significant amo
Autor:
V. A. Marchenko, V. G. Beshenkov, L. A. Fomin, D.V. Irzhak, A. G. Znamenskii, V.I. Nikolaichik
Publikováno v:
Thin Solid Films. 520:6888-6892
Heteroepitaxial Ir films on Si(001) with a double ceria/yttria stabilized zirconia heteroepitaxial buffer layer were grown by magnetron sputtering. As-deposited CeO 2 films covered with {111} faceted pyramids resulted in iridium films with the [001]
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 5:930-933
In this study it has been found that a TiO2/Ti double adhesion layer is used for SiO2/Si substrate and a YSZ layer is used for SiO2/Si and Si substrates to achieve high residual polarization of PZT layers on platinum. Epitaxial deposition of YSZ on S
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 4:761-765
The composition of PZT thin films deposited by diode HF sputtering of a ceramic target on Pt/Ti/SiO2/Si substrates was studied. The remanent polarization of grown films was to 22 μC/cm2. A technique for verifying the adequacy of elemental and phase
Autor:
E. S. Demidov, S. N. Gusev, V. G. Beshenkov, M. V. Sapozhnikov, S. Yu. Zubkov, D. E. Nikolitchev, V. P. Lesnikov, S. A. Levchuk, V. V. Podol’ski
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 4:366-373
The results of studying random silicon-manganese alloys with Mn concentration increased up to 50 at % and discrete alloys (multilayer structures with silicon and manganese layers 5–20 and 1–5 nm thick, respectively) deposited from laser plasma ar
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 2:705-708
To investigate the composition of interfaces of thin CeO2 films on silicon, two diagnostic approaches, the elemental and phase composition analyses by Auger spectra under ion profiling, are used. The interrelation between the conditions of epitaxial