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pro vyhledávání: '"V. G. Abdrashitov"'
Autor:
V. V. Ryzhov, V. G. Abdrashitov
Publikováno v:
Russian Physics Journal. 37:410-422
Models and a suite of programs (TRION, PIRSON, CHAPS, and DYCOD) that make it possible to calculate the impurity distribution for any implantation dose in a target with arbitrary composition are described. Test calculations for each program showed th
Publikováno v:
Russian Physics Journal. 36:796-800
A SCAT program is developed for calculation of the angular distribution of multiply scattered ions in the case of various interaction potentials. The accuracy attained is higher than that obtained with the well-known Meyer and Sigmund programs. The i