Zobrazeno 1 - 3
of 3
pro vyhledávání: '"V. E. Stukalova"'
Autor:
T. G. Konstantinova, M. M. Andronic, D. A. Baklykov, V. E. Stukalova, D. A. Ezenkova, E. V. Zikiy, M. V. Bashinova, A. A. Solovev, E. S. Lotkov, I. A. Ryzhikov, I. A. Rodionov
Publikováno v:
Scientific Reports, Vol 13, Iss 1, Pp 1-9 (2023)
Abstract Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its chemical resistance, optical, electrical, and mechanical performance. Wet etching is the key method for fabricating of such microdev
Externí odkaz:
https://doaj.org/article/005e3f3eb6ee4ccfb9ff301e962a7b24
Autor:
T. G. Konstantinova, M. M. Andronic, D. A. Baklykov, V. E. Stukalova, D. A. Ezenkova, E. V. Zikiy, M. V. Bashinova, A. A. Solovev, E. S. Lotkov, I. A. Ryzhikov, I. A. Rodionov
Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its ultimate chemical resistance, optical, electrical, and mechanical performance. Wet etching in hydrofluoric solutions especially a buffered ox
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7c904b00909d334d0e71b1d9f6a93f21
http://arxiv.org/abs/2212.06699
http://arxiv.org/abs/2212.06699
Autor:
A.S. Baburin, E.S. Lotkov, E.V. Sergeev, M. Andronic, D. A. Baklykov, V. E. Stukalova, K. A. Buzaverov, S.S Avdeev, I.A. Ryzhikov, I.V. Dyakonov, N. Skryabin, M. Yu. Saygin, S.P. Kulik, I.A. Rodionov
Publikováno v:
2022 International Conference Laser Optics (ICLO).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af896637e182002e2caf29ea2f29fd59
https://doi.org/10.1109/iclo54117.2022.9839948
https://doi.org/10.1109/iclo54117.2022.9839948