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pro vyhledávání: '"V. E. Pautkin"'
Autor:
V. E. Pautkin
Publikováno v:
Glass and Ceramics. 77:329-331
The physicochemical processes occurring in the structure of alkaline glass and at a silicon – glass interface with anodic bonding of the glass and silicon wafers were studied. The bonding of these materials is now widely used in industry in the dev
Publikováno v:
Nano- i Mikrosistemnaya Tehnika. 21:341-346
Autor:
V. E. Pautkin
Publikováno v:
Glass and Ceramics. 76:142-144
The use of alkali glass in micromechanical sensors, specifically, accelerometers, is shown. Alkali glass is used in the sensitive elements of the indicated devices. The main technological operation in the assembly of such sensitive elements is electr
Autor:
V. E. Pautkin
Publikováno v:
Measuring. Monitoring. Management. Control.
Publikováno v:
Reliability & Quality of Complex System.