Zobrazeno 1 - 10
of 53
pro vyhledávání: '"V. Cassagne"'
Publikováno v:
Measurement. 51:451-456
The performance of a photovoltaic module is mainly defined by the maximum power Pmax, which is measured under standard conditions (1000 W/m2, AM 1.5, 25 °C) using a sunlight (natural or simulated) and a calibrated reference device. This reference ph
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d2531cabd397063c460bf130779fc333
https://doi.org/10.1016/j.measurement.2014.02.025
https://doi.org/10.1016/j.measurement.2014.02.025
Autor:
D. Douai, V. Cassagne, Vladimir Yegorenkov, S. Martins, K. Landry, Valeriy Lisovskiy, Jean-Paul Booth
Publikováno v:
Physics Letters A. 376:2238-2243
This Letter outlines the experimental study of molecule dissociation effect on rf capacitive discharge burning. We show that for each ammonia pressure value there exists some threshold rf voltage value below which the dissociation degree does not exc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::32b3cc4294f5e327b0485063a1b29ba1
https://doi.org/10.1016/j.physleta.2012.05.040
https://doi.org/10.1016/j.physleta.2012.05.040
Autor:
Valeriy Lisovskiy, K. Landry, V. Cassagne, J. Jolly, Vladimir Yegorenkov, S. Martins, D. Douai, Jean-Paul Booth
Publikováno v:
Journal of Physics D: Applied Physics. 40:6989-6999
This paper presents the results of an experimental study of rf capacitive discharge in low-pressure SF6. The rf discharge in SF6 is shown to exist not only in weak-current (α-) and strong-current (γ-) modes but also in a dissociative δ-mode. This
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7a983fbc25ccd635107d48d9feb4456
https://doi.org/10.1088/0022-3727/40/22/020
https://doi.org/10.1088/0022-3727/40/22/020
Publikováno v:
Vacuum. 82:321-327
The present paper reports the results of studying the characteristics of the etching process of multi-layered materials (Si 3 N 4 /SiO 2 /Si and SiO 2 /Si) and of cleaning technological chambers covered with silicon nitride films (Si 3 N 4 ) in a NF
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e97b031a52d704550d3b35c73e1e748
https://doi.org/10.1016/j.vacuum.2007.04.035
https://doi.org/10.1016/j.vacuum.2007.04.035
Publikováno v:
Journal of Physics D: Applied Physics. 40:6631-6640
This paper shows that the rf capacitive discharge in NF3 and SiH4 can burn in three possible modes: weak-current α-mode, strong-current γ -mode and dissociative δ -mode. This new dissociative δ-mode is characterized by a high dissociation degree
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29af86c352a7a1f3358090cc1b7ed14d
https://doi.org/10.1088/0022-3727/40/21/023
https://doi.org/10.1088/0022-3727/40/21/023
Publikováno v:
IEEE Transactions on Plasma Science. 35:416-424
We report the measured extinction curves and current-voltage characteristics (CVCs) in several gases of RF capacitive discharges excited at 13.56 MHz in chambers of three different geometries: 1) parallel plates surrounded by a dielectric cylinder ("
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fab29efdf76bfc3cf05ee04e3e13f5b8
https://doi.org/10.1109/tps.2007.893261
https://doi.org/10.1109/tps.2007.893261
Publikováno v:
The European Physical Journal Applied Physics. 36:177-182
We propose a new technique for evaluating the RF voltage across the electrodes of low-pressure capacitively-coupled plasma reactors when direct measurements are not possible. It is based on determining the coordinates of the turning point in the RF b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e3882398931b51a97ebbc622fb595d0
https://doi.org/10.1051/epjap:2006116
https://doi.org/10.1051/epjap:2006116
Publikováno v:
Journal of Physics D: Applied Physics. 39:1866-1871
This paper presents measurements of the electron drift velocity Vdr in SF6 gas for high reduced electric fields (E/N = 330–5655 Td (1 Td = 10 −17 Vc m 2 )). The drift velocities were obtained using the method of Lisovskiy and Yegorenkov (1998 J.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::508cc0bc53689f5d538a59484623c29a
https://doi.org/10.1088/0022-3727/39/9/022
https://doi.org/10.1088/0022-3727/39/9/022
Publikováno v:
Journal of Physics D: Applied Physics. 39:660-665
We report measurements of the breakdown curves for low-pressure rf capacitive discharges in nitrogen, hydrogen, argon, oxygen and ammonia. The electron drift velocity in these gases was deduced, as a function of reduced electric field, from the low-p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f35f27b317db6b81ffec12a93864feb5
https://doi.org/10.1088/0022-3727/39/4/011
https://doi.org/10.1088/0022-3727/39/4/011
Publikováno v:
Europhysics Letters (EPL). 71:407-411
Breakdown and extinction curves have been measured for RF capacitive low-pressure discharges in nitrogen and hydrogen at a frequency of 13.56 MHz and discharge gaps between 6 and 25 mm. In particular, the low-pressure, high-voltage region of the exti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edc73f8c9f255c7acd17bebeb71dd94d
https://doi.org/10.1209/epl/i2005-10108-1
https://doi.org/10.1209/epl/i2005-10108-1