Високочастотна плазма при атмосферному тиску як засіб осадження тонких плівок

Autor: P. P. Melnychuk, V. A. Rudnitskyi

Publikováno v: Technical Engineering; № 2(84) (2019); 36-42
Техническая инженерия; № 2(84) (2019); 36-42
Технічна інженерія; № 2(84) (2019); 36-42

The main units of the industrial high-frequency generator have been modernized. The design and technical coordination of the plasma torch impedance was developed in order to obtain high-frequency plasma with capacitive coupling for the transmission o

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8f9a3b2bb2972dc52a5250438360b1e0
https://doi.org/10.26642/ten-2019-2(84)-36-42