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pro vyhledávání: '"V. А. Saladukha"'
Publikováno v:
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 18, Iss 2, Pp 105-111 (2020)
The paper is purposed to establish the principles of the micro-structural changes of Pt-Si system during the rapid thermal treatment. The Pt films 43.7 nm thick were applied on the substrates of mono-crystal silicon KEF 0.5 with orientation (111) by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a3679ac6f3cb6a2c0d4387a84431c8c5
https://doklady.bsuir.by/jour/article/view/2647
https://doklady.bsuir.by/jour/article/view/2647
