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Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm
Autor:
Utteridge, S. J., Sashin, V. A., Canney, S. A., Ford, M. J., Fang, Z., Oliver, D. R., Vos, M., Weigold, E.
Publikováno v:
Applied Surface Science; 2000, Vol. 162 Issue: 1 p359-367, 9p