Lanthanum doped hafnium oxide thin films deposited on a lateral high aspect ratio structure using atomic layer deposition: A comparative study of surface composition and uniformity using x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry

Autor: Emara, Jennifer, Kia, Alireza M., Bönhardt, Sascha, Mart, Clemens, Kühnel, Kati, Haufe, Nora, Puurunen, Riikka L., Utriainen, Mikko, Weinreich, Wenke

Publikováno v: In Applied Surface Science 30 January 2025 680

Optical metrology of 3D thin film conformality by LHAR chip assisted method

Autor: Utriainen, Mikko, Saastamoinen, Kimmo, Rekola, Heikki, Ylivaara, Oili M.E., Puurunen, Riikka L., Hyttinen, Pasi

Publikováno v: Utriainen, M, Saastamoinen, K, Rekola, H, Ylivaara, O M E, Puurunen, R L & Hyttinen, P 2022, Optical metrology of 3D thin film conformality by LHAR chip assisted method . in L E Busse, Y Soskind & P C Mock (eds), Photonic Instrumentation Engineering IX ., 120080D, International Society for Optics and Photonics SPIE, Proceedings of SPIE-The International Society for Optical Engineering, vol. 12008, Photonic Instrumentation Engineering IX, San Francisco, California, United States, 20/02/22 . https://doi.org/10.1117/12.2609643

Publisher Copyright: © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. The paper presents a novel and fast method to characterize thin film conformality on microscopic 3D High Aspect Ratio substrates. The thin film de

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https://cris.vtt.fi/en/publications/d7370847-2eec-4a06-8789-c357d57596e2

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Comparison of milk analysis performance between NIR laboratory analyser and miniaturised NIR MEMS sensors

Autor: Uusitalo, Sanna, Aernouts, Ben, Sumen, Juha, Hietala, Eero, Utriainen, Mikko, Frondelius, Lilli, Kajava, Sari, Pastell, Matti

The dairy farms have a need for on-site milk analysis to determine the fat and protein content of the milk in real-time manner during milking. Near infrared (NIR) spectroscopy has shown promise as an on-farm tool for fat and protein content determina

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______1131::c081c3f9ea30ab49b9eef56183d192b3
https://lirias.kuleuven.be/handle/123456789/645677

Optical metrology of 3D thin film conformality by LHAR chip assisted method

Autor: Busse, Lynda E., Soskind, Yakov, Utriainen, Mikko, Saastamoinen, Kimmo, Rekola, Heikki, Ylivaara, Oili M. E., Puurunen, Riikka L., Hyttinen, Pasi

Publikováno v: Proceedings of SPIE; March 2022, Vol. 12008 Issue: 1 p120080D-120080D-8, 1080729p