Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ulrich Wegmann"'
Autor:
Günter Dach, Ulrich Wegmann
Publikováno v:
Energy & Environment. 13:579-589
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a697b54f184bea08891917282e339d8e
https://doi.org/10.1260/095830502320939561
https://doi.org/10.1260/095830502320939561
Autor:
Helmut Haidner, Oscar Noordman, Melchior Mulder, Manfred Maul, Marco Hugo Petrus Moers, Jan van Schoot, Robert John Socha, Jan Baselmans, Donis G. Flagello, Xuelong Shi, Jo Finders, Andre Engelen, Wim de Boeij, Martin Schriever, Rene Carpaij, Ulrich Wegmann, Markus Goeppert, Mark van de Kerkhof, Paul Graeupner, Henk van Greevenbroek
Publikováno v:
SPIE Proceedings.
Current roadmaps show that the semiconductor industry continues to drive the usable Rayleigh resolution towards thefundamental limit (for 50% duty cycle lines) at k 1 =0.25. This is being accomplished through use of various resolutionenhancement tech
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::07698b9bd527cac614680a8761581b9b
https://doi.org/10.1117/12.485340
https://doi.org/10.1117/12.485340
Publikováno v:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection.
We will report on a new interferometer developed at Carl Zeiss, which has real-time measuring capability with instant visualization of results, is nearly insensitive to vibrations, has a variable fringe spacing from one lambda to lambda/1O (lambda re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0072a437f7721d68b8d33e9ef6767d3
https://doi.org/10.1117/12.51047
https://doi.org/10.1117/12.51047
Publikováno v:
Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection.
The new Zeiss interferometer works with a complex software package which can be run in two different modes : a "workshop mode" for simple pushbutton operation of standard measurement sequences, and a "master mode" well suited for the use in the labor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a49801a5c2101d13280ca119c1c8cf59
https://doi.org/10.1117/12.51117
https://doi.org/10.1117/12.51117