Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ulrich Matejka"'
Autor:
Ulrich Matejka, Jan Hendrik Peters, Krister Magnusson, Sascha Perlitz, Michael Goldstein, Anthony Garetto, Markus Weiss, Dirk Hellweg, Renzo Capelli
Publikováno v:
SPIE Proceedings.
Overcoming the challenges associated with photomask defectivity is one of the key aspects associated with EUV mask infrastructure. In addition to establishing specific EUV mask repair approaches, the ability to identify printable mask defects that re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68a6d501ec6c4ce4df1fac616b858dd8
https://doi.org/10.1117/12.2068308
https://doi.org/10.1117/12.2068308
Autor:
Sascha Perlitz, Markus Weiss, Dirk Hellweg, Jan Hendrik Peters, Ulrich Matejka, Anthony Garetto
Publikováno v:
SPIE Proceedings.
In previous conferences the status of the AIMS™ EUV project has been presented in which the basic layout scheme and preliminary design have been shown along with the targeted performance specification levels to be met. Presently the final design mi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f71b2ef84fb96365696dca5c9c50bfd
https://doi.org/10.1117/12.981345
https://doi.org/10.1117/12.981345