Výsledky vyhledávání - "Ullal, Saurabh J."

Akademický článek

Relation between the ion flux, gas phase composition, and wall conditions in chlorine plasma etching of silicon.

Autor: Ullal, Saurabh J., Kim, Tae Won, Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2003, Vol. 21 Issue 3, p589-595, 7p

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Akademický článek

An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors.

Autor: Kim, Tae Won, Ullal, Saurabh J., Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Review of Scientific Instruments; Oct2002, Vol. 73 Issue 10, p3494, 6p

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Akademický článek

Formation and removal of composite halogenated silicon oxide and fluorocarbon films deposited on chamber walls during plasma etching of multiple film stacks.

Autor: Ullal, Saurabh J., Singh, Harmeet, Daugherty, John, Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2002, Vol. 20 Issue 5, p1939-1946, 8p

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Akademický článek

Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si.

Autor: Ullal, Saurabh J., Singh, Harmeet, Daugherty, John, Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 4, p1195-1201, 7p

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Akademický článek

Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor.

Autor: Ullal, Saurabh J., Godfrey, Anna R., Edelberg, Erik, Braly, Linda, Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2002, Vol. 20 Issue 1, p43-52, 10p

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Akademický článek

New diagnostic method for monitoring plasma reactor walls: Multiple total internal reflection Fourier transform infrared surface probe.

Autor: Godfrey, Anna R., Ullal, Saurabh J., Braly, Linda B., Edelberg, Erik A., Vahedi, Vahid, Aydil, Eray S.

Publikováno v: Review of Scientific Instruments; Aug2001, Vol. 72 Issue 8, 1 Black and White Photograph, 5 Diagrams, 1 Chart, 13 Graphs

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