Zobrazeno 1 - 10
of 411
pro vyhledávání: '"Ukraintsev, Vladimir A."'
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS, 18(4)
Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII, 10959
Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXXIII, 10959
Background: Monte Carlo simulations of scanning electron microscopy (SEM) images ignore most surface effects, such as surface plasmons. Previous experiments have shown that surface plasmons play an important role in the emission of secondary electron
Autor:
Witvoet, G., Peters, J., Kuiper, S., Keyvani, S., Willekers, R., Ukraintsev, Vladimir A., Adan, Ofer
Publikováno v:
Ukraintsev, V.A.Adan, O., Proceedings Metrology, Inspection, and Process Control for Microlithography XXXIII, 25-28 February 2019, San Jose, CA, USA
Metrology, Inspection, and Process Control for Microlithography XXXIII
Metrology, Inspection, and Process Control for Microlithography XXXIII
TNO is developing a novel Large Dynamic Range Atomic Force Microscope (LDR-AFM), primarily but not exclusively designed for sub-nm accurate overlay metrology. The LDR-AFM combines an AFM with a 6 degrees- of-freedom interferometric positioning stage,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9cd9c5a3917e2b5b05050a743faa1f4
http://resolver.tudelft.nl/uuid:5529a327-699d-47ec-b639-c24d2d68a078
http://resolver.tudelft.nl/uuid:5529a327-699d-47ec-b639-c24d2d68a078
Autor:
Sanchez, Martha, Ukraintsev, Vladimir, Lakcher, Amine, Le-Gratiet, Bertrand, Ducote, Julien, Fanton, Pierre, Kiers, Ton, Gemmink, Jan-Willem, Hunsche, Stefan, Prentice, Christopher, Besacier, Maxime
Publikováno v:
SPIE Advanced Lithography
SPIE Advanced Lithography, 2017, San Jose, United States. ⟨10.1117/12.2257876⟩
SPIE Advanced Lithography, 2017, San Jose, United States. ⟨10.1117/12.2257876⟩
Today’s CD-SEM metrology is challenged when it comes to measuring complex features found in patterning hotspots (like tip to tip, tip to side, necking and bridging). Metrology analysis tools allow us to extract SEM contours of a feature and convert
Autor:
Verduin, T., Lokhorst, S.R., Hagen, C.W., Kruit, P., Sanchez, Martha I., Ukraintsev, Vladimir A.
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXX, 9778
We have developed a fast three dimensional Monte-Carlo framework for the investigation of shotnoise induced side-wall roughness (SWR) formation. The calculation outline is demonstrated by an example for an exposure of a 100nm thick layer of negative
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::333d91d6975cca8e3e892931d01513d8
http://resolver.tudelft.nl/uuid:131f1057-156c-414a-9107-4b46e3fcbeaf
http://resolver.tudelft.nl/uuid:131f1057-156c-414a-9107-4b46e3fcbeaf
Autor:
Ukraintsev, Vladimir, Banke, Bill
Publikováno v:
Laser Focus World. Dec2010, Vol. 46 Issue 12, p68-71. 4p.
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Dou, Shuyang, Shinoda, Shinichi, Ishikawa, Masayoshi, Yumiba, Ryo, Toyoda, Yasutaka, Shindo, Hiroyuki, Izawa, Masayuki, Ouchi, Masanori
Publikováno v:
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592G-109592G-8, 986337p
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Papavieros, George, Kontoyiannis, Ioannis, Constantoudis, Vassilios, Gogolides, Evangelos
Publikováno v:
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592Z-109592Z-8, 986337p
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Skliarov, Vladimir, Neyezhmakov, Pavel, Prokopov, Alexander
Publikováno v:
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592Y-109592Y-8, 986337p
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Xu, Buqing, Ma, Ling, Zou, Xiongfeng, Dong, Lisong, Wei, Yayi
Publikováno v:
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592X-109592X-16, 10849625p
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Pu, Lingling, Wang, Teng, Huisman, Thomas J., Maas, Ruben, Goosen, Maikel, Dillen, Harm, Leray, Philippe, Fang, Wei
Publikováno v:
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592W-109592W-8, 986337p