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Publikováno v:
Journal of The Electrochemical Society. 138:308-313
A differential reflectance technique has been applied to study the etching of Silicon dioxide films on Silicon substrates in-situ in the liquid Hydrogen Fluoride/Water environment as well as ex-situ. Essentially, the technique scans an incident optic
Conference
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Autor:
Axel Frey
The Korean Biographical Index facilitates access to the approximately 110,000 biographical entries in the Korean Biographical Archive on 40,000 women and men from all epochs of Korean history.
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The conten