High-temperature real-time observation of surface defects induced by single ion irradiation using scanning-tunneling-microscope/ion-gun combined system.

Autor: Shimada, Kazuyoshi, Ishimaru, Tetusya, Yamawaki, Takuya, Uchigasaki, Makoto, Tomiki, Kenichi, Matsukawa, Takashi, Ohdomari, Iwao

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 5, p1989-1994, 6p