Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Ubrig, J."'
Publikováno v:
In Applied Surface Science 2009 256(3) Supplement:S54-S57
Autor:
Dubourdieu, C., Brizé, V., Ubrig, J., Margueron, S., Matko, I., Rauwel, E., Ducroquet, F., Rochat, N., Klein, A., Höllander, B.
Publikováno v:
Invited paper, 15th Workshop on Dielectrics in Microelectronics, Berlin
Invited paper, 15th Workshop on Dielectrics in Microelectronics, Berlin, Jun 2008, xx, France
Invited paper, 15th Workshop on Dielectrics in Microelectronics, Berlin, Jun 2008, xx, France
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2693bb9a983edb0a6f0f4fc20cc72c16
https://hal.archives-ouvertes.fr/hal-00392120
https://hal.archives-ouvertes.fr/hal-00392120
23rd European Photovoltaic Solar Energy Conference and Exhibition, 1-5 September 2008, Valencia, Spain; 712-715
SiOxCy monolayers or stacked multilayers have been deposited at low temperature using a low frequency (100 kHz) plasma-enhanced chemi
SiOxCy monolayers or stacked multilayers have been deposited at low temperature using a low frequency (100 kHz) plasma-enhanced chemi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4e1eb58aeb8a88da42b57da1c3d49f3
Publikováno v:
Journal of Physics: Conference Series; 2008, Vol. 100 Issue 1, p082030-082033, 4p