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Publikováno v:
Measurement Techniques. 39:281-284
A description is given of the chief stages and principles of the development (over more than a decade) of an electromagnetic impedance method for the investigation and parameter control of semiconducting layers —epitaxial, diffusion structures, and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4224aced02cc94453a954d8bfc4a9216
https://doi.org/10.1007/bf02374580
https://doi.org/10.1007/bf02374580
