Zobrazeno 1 - 10
of 103
pro vyhledávání: '"U. Frotscher"'
Autor:
Ruediger Arens-Fischer, Gilles Lerondel, Markus Thönissen, W Theiß, U. Frotscher, Manja Krüger, P. Grosse, Hans Lüth, S Hillbrich, Sophie Billat, M. G. Berger
Publikováno v:
Thin Solid Films. 297:92-96
We have investigated changes in the etch rate of p-PS with increasing etching time as well as changes of the porosity of buried layers with depth. These effects can be attributed to the influence of chemical etching and variations in the electrolyte
Autor:
Michael Krüger, Markus Thönissen, U. Rossow, U. Frotscher, Hans Lüth, Sophie Billat, M. G. Berger
Publikováno v:
Journal of Applied Physics. 80:2990-2993
The two possible causes of depth inhomogeneities of the microstructure of porous silicon are changes in the HF concentration with depth and a varying chemical etching rate of the porous silicon layer. During anodization chemical etching will become i
Publikováno v:
Applied Surface Science. :552-556
In this paper we show that the lineshapes of the dielectric functions of porous p-doped silicon layers are strongly correlated to their original bulk doping concentrations. Features in the dielectric functions of layers formed from heavily doped bulk
Publikováno v:
Applied Surface Science. 102:413-416
The dielectric function of porous silicon layers depends strongly on the nanostructure of the silicon skeleton. In this paper we discuss the main effects, as determined from spectroscopic ellipsometric measurements of the dielectric functions of poro
Autor:
Ruediger Arens-Fischer, H. Münder, M. G. Berger, C. Pietryga, M Ebert, Wolfgang Richter, U. Frotscher, U. Rossow
Publikováno v:
Thin Solid Films. 276:36-39
In this paper we investigate the oxidation of porous silicon by O3, H2O2, and, for comparison, in normal air. Such an oxidation may serve as passivation for porous silicon in applications in order to prevent devices from degradation. The changes in t
Autor:
U. Frotscher, H. Münder, Wolfgang Richter, M. G. Berger, Markus Thönissen, St. Frohnhoff, U. Rossow
Publikováno v:
Thin Solid Films. 255:5-8
The influence of various parameters of the electrochemical process on the resulting microstructure of porous silicon layers was studied by spectroscopic ellipsometry. The first parameter, the etching time, is known to determine the layer thickness. I
Publikováno v:
Surface Science. :597-602
The growth of thin Sb layers on GaAs(100) was studied in ultra high vacuum by means of Raman scattering and spectroscopic ellipsometry. Clean (100) surfaces were prepared by heating As-passivated MBE-grown GaAs substrates. The Raman spectra taken aft
Autor:
R. Herino, U. Rossow, H. Münder, M. Ligeon, Hans Lüth, U. Frotscher, M. G. Berger, Wolfgang Richter
Publikováno v:
Applied Surface Science. 63:57-61
Porous silicon films consist of a complicated network of crystals with diameters down to the nanometer range. In the smallest crystals phonons and electrons are localized. From the Raman spectra the distributions of the nanocrystal diameters are esti
Publikováno v:
MRS Proceedings. 405
The dielectric function of porous silicon layers depends strongly on the electronic properties of the nanostructure of the silicon skeleton. In this paper we discuss the main effects, as determined from spectroscopic ellipsometric measurements of the