Zobrazeno 1 - 10
of 46
pro vyhledávání: '"Tzou, S.F."'
Autor:
Cheng, P.L., Liao, C.I., Chien, C.C., Yang, C.L., Ting, S.F., Jeng, L.S., Huang, C.T., Cheng, Osbert, Tzou, S.F., Hsu, W.S.
Publikováno v:
In Materials Chemistry and Physics 2008 107(2):471-475
Publikováno v:
2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference; 2008, p2-5, 4p
Publikováno v:
2007 15th International Conference on Advanced Thermal Processing of Semiconductors; 2007, p127-130, 4p
Autor:
Li, C.I., Chin Cheng Chien, Huang, K.T., Po Yuan Chen, Hsiang Ying Wang, Tzou, S.F., Chen, S., Lin, J., Fu, T., Tandjaja, R., Ramamurthy, S., Chung, E., Chuang, J., Wen-Shan Chen
Publikováno v:
2005 13th International Conference on Advanced Thermal Processing of Semiconductors; 2005, p163-167, 5p
Publikováno v:
2007 International Symposium on Semiconductor Manufacturing; 2007, p1-3, 3p
Autor:
Chen, Y.-C., Hung, T.-Y., Chang, Y.-L., Shieh, K., Hsu, C.-L., Huang, C., Yan, W.H., Ashtiani, K., Pisharoty, D., Lei, W., Chang, S., Huang, F., Collins, J., Tzou, S.F.
Publikováno v:
2007 IEEE International Interconnect Technology Conference; 2007, p105-107, 3p
Chemical and Plasma Oxidation Behaviors of NiSi and NiPtSi Salicide Films in 65nm Node CMOS Process.
Publikováno v:
2007 IEEE International Interconnect Technology Conference; 2007, p99-101, 3p
Publikováno v:
2007 IEEE International Interconnect Technology Conference; 2007, p37-39, 3p
A Hybrid Dry-Wet Approach for Removal of a Dummy Polysilicon Gate in a Replacement Metal Gate Scheme
Autor:
Hwang, Guang Yaw, Liao, J.H., Tzou, S.F., Lin, Mark, Yeh, Autumn, Lou, David, Chen, Eason, Huang, Weien, Kamarthy, Gowri, Xu, Kai Dong, Athayde, Amulya
Publikováno v:
Diffusion and Defect Data Part B: Solid State Phenomena; April 2012, Vol. 187 Issue: 1 p57-60, 4p
Autor:
Chen, Yi Wei, Ho, Nien Ting, Lai, Jerander, Tsai, T.C., Huang, C.C., Tzou, S.F., Chu, James M.M.
Publikováno v:
Diffusion and Defect Data Part B: Solid State Phenomena; January 2009, Vol. 145 Issue: 1 p211-214, 4p