Chapter 15 - MEMS lithography

Autor: Franssila, Sami, Tuomikoski, Santeri

Publikováno v: In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:399-416

Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Autor: Tuomikoski, Santeri ^*, Franssila, Sami

Publikováno v: In Sensors & Actuators: A. Physical 2005 120(2):408-415

List of contributors

Autor: Aalto, Timo, Airaksinen, Veli-Matti, Albert, Stephan Gerhard, Allegato, Giorgio, Amiotti, Marco, Anttila, Olli, Auersperg, Juergen, Bonucci, Antonio, Bose, Indranil Ronnie, Braun, Tanja, Broas, Mikael, Burggraf, J., Cameron, Christopher, Candler, Rob N., Cao, Zhen, Cardoso, André, Chen, Kuo-Shen, Conte, Andrea, Cozma, Adriana, Davis, Cristina E., Dempwolf, Sophia, Dixit, Pradeep, Dost, Michael, Dragoi, Viorel, Eränen, Simo, Fain, Bruno, Figeys, B., Fischer, Andreas C., Flötgen, Christoph, Franssila, Sami, Friedberger, Alois, Fueldner, Marc, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Grimes, Michael, Haapalinna, Atte, Hagelin, Paul, Hammond, Paul, Henttinen, Kimmo, Henttonen, Vesa, Horsley, David, Hoshi, Takeo, Itoh, Satoshi, Jakobsen, Henrik, Jansen, R., Jonsson, Kerstin, Kähler, Dirk, Kannojia, Harindra Kumar, Kattelus, Hannu, Kissinger, Gudrun, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Landesberger, Christof, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lin, Yuyuan, Lindner, Paul F., Lodewijks, K., Lofink, Fabian, Longoni, Giorgio, Luber, Sebastian Markus, Mahmud-ul-hasan, M., Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Maspero, Federico, Mattila, Toni T., Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nieminen, Risto M., Niklaus, Frank, Oggioni, Laura, Olkkonen, Juuso, Österlund, Elmeri, Ou, Kuang-Shun, Paloheimo, Jari, Pasanen, Toni P., Paulasto-Kröckel, Mervi, Plach, Thomas, Polizzi, Jean-Philippe, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rochus, V., Ross, Glenn, Rottenberg, X., Sainiemi, Lauri, Savin, Hele, Schenk, Harald, Schikowski, Marc, Schulze, Matthias, Seema, S., Severi, S., Skogström, Lasse, Suga, Tadatomo, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tilmans, H.A.C., Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Valzasina, Carlo, Veijola, Timo, Viinikka, Eeva, Vogel, Dietmar, Vogl, Andreas, Vuorinen, Vesa, Westervelde, W.J., Wicht, Sebastian, Wieland, Robert, Winkler, Bernhard, Yobas, Levent, Zanotti, Luca, Zubel, I.

Publikováno v: In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii

List of Contributors

Autor: Aalto, Timo, Airaksinen, Veli-Matti, Amiotti, Marco, Anttila, Olli, Bonucci, Antonio, Brudziński, K., Candler, Rob N., Cao, Zhen, Chen, Kuo-Shen, Conte, Andrea, Davis, Cristina E., Dixit, Pradeep, Dragoi, Viorel, Eränen, Simo, Fischer, Andreas C., Franssila, Sami, Friedberger, Alois, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Gronicz, J., Haapalinna, Atte, Hagelin, Paul M., Hammond, Paul, Henttinen, Kimmo, Horsley, David, Inoue, Akihisa, Jakobsen, Henrik, Jonsson, Kerstin, Kähler, Dirk, Kattelus, Hannu, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Lapadatu, Adriana Cozma, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lindner, Paul, Lindroos, Veikki, Lofink, Fabian, Longoni, Giorgio, Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Mattila, Toni, Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nagao, S., Nieminen, Risto M., Niklaus, Frank, Nowak, R., Olkkonen, Juuso, Ou, Kuang-Shun, Paloheimo, Jari, Paulasto-Kröckel, Mervi, Pohjonen, Helena, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rottenberg, Xavier, Ryhänen, Tapani, Sainiemi, Lauri, Savin, Hele, Sharma, Parmanand, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Veijola, Timo, Viinikka, Eeva, Vogl, Andreas, Vuorinen, Vesa, Yobas, Levent, Zachariasz, P., Zubel, I.

Publikováno v: In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:xiii-xv

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