Arrays of addressable contactless optical microshutters

Autor: Tue Ravnkilde, Roberto Frosio, Henri Vuillomenet, Henning Henningsen, Gregoire Perregaux, Jean-Philippe Thiébaud, Stephan Gonseth, Carsten Underbjerg, Patrick Debergh

Publikováno v: Microsystem Technologies. 11:1171-1175

The present paper describes the development of contactless optical microshutter arrays, which are mounted in an assembly of microlenses, optical fibers and driving electronics. In the past, complete systems have been made, for different applications,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9a05d32db75d276b8c31f6e7f9816a1d
https://doi.org/10.1007/s00542-005-0583-8

MEMS device for bending test: measurements of fatigue and creep of electroplated nickel

Autor: Anette Alsted Rasmussen, Kristian Pontoppidan Larsen, Morten Ginnerup, Ole Hansen, Jan Tue Ravnkilde

Publikováno v: Sensors and Actuators A: Physical. 103:156-164

In situ bending test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel. The device features approximately pure in-plane bending of the test beam. The excitation of the test beam has fixed displacem

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::50e5c0d092c336614ad5865e4f7092b5
https://doi.org/10.1016/s0924-4247(02)00306-0

Electroforming of 3D microstructures on highly structured surfaces

Autor: B. Löchel, Leif Steen Johansen, Jan Tue Ravnkilde, Peter Torben Tang, Morten Ginnerup

Publikováno v: Sensors and Actuators A: Physical. 83:156-160

Electrodeposition of photoresist on highly structured surfaces is combined with electroplating to fabricate three new types of advanced 3D metal microstructures. In one application, electroplated nickel cantilever arrays are formed on the sloped side

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::aaf0e0f1913eac8d1af9c5ae9c599970
https://doi.org/10.1016/s0924-4247(00)00346-0

Devices for fatigue testing of electroplated nickel (MEMS)

Autor: Jan Tue Ravnkilde, Morten Ginnerup, Kristian Pontoppidan Larsen, Ole Hansen

Publikováno v: Larsen, K P, Ravnkilde, J T, Ginnerup, M & Hansen, O 2002, Devices for fatigue testing of electroplated nickel (MEMS) . in The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002. . IEEE, pp. 443-446, 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, United States, 20/01/2002 . https://doi.org/10.1109/MEMSYS.2002.984298
ResearcherID
Scopus-Elsevier

In-situ fatigue test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel (nano-nickel). The devices feature in-plane approximately pure bending with fixed displacement of the test specimen of the dim

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::001eb1a5890ba755a1748485962c36c2
https://doi.org/10.1109/memsys.2002.984298

Field-Induced Deformation as a Mechanism for Scanning Tunneling Microscopy Based Nanofabrication

Autor: Ulrich Quaade, Kurt Stokbro, Jan Tue Ravnkilde, Ole Hansen, Francois Grey

Publikováno v: Hansen, O, Ravnkilde, J T, Quaade, U, Stokbro, K & Grey, F 1998, ' Field-Induced Deformation as a Mechanism for Scanning Tunneling Microscopy Based Nanofabrication ', Physical Review Letters, vol. 81, no. 25, pp. 5572-5575 . https://doi.org/10.1103/PhysRevLett.81.5572
ResearcherID
Scopus-Elsevier

The voltage between tip and sample in a scanning tunneling microscope (STM) results in a large electric field localized near the tip apex. The mechanical stress due to this field can cause appreciable deformation of both tip and sample on the scale o

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7a82153369e5d4e1251b2f8454342705
https://orbit.dtu.dk/en/publications/e616f31f-aec6-4277-91c5-30caa60a8cbc