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Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range

Autor: Pariev Dmitriy, Svechnikov Mikhail, Nechay Andrey, Sokolov Andrey, Tsybin Nikolay, Pestov Alexey, Schäfers Franz, Polkovnikov Vladimir, Zuev Sergey, Lopatin Alexey, Chkhalo Nikolay, Salashchenko Nikolay, Sertsu Mewael

Publikováno v: Journal of Nanoscience and Nanotechnology
Journal of Nanoscience and Nanotechnology, American Scientific Publishers, 2019, 19 (1), pp.546-553. ⟨10.1166/jnn.2019.16474⟩

International audience; This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the incr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::03921593ffe0d1ac61cdbca54c5cbf2c
https://pubmed.ncbi.nlm.nih.gov/30327068