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pro vyhledávání: '"Tsuyoshi Gary Watanabe"'
Autor:
Wojtek J. Poppe, Koichi Fujiwara, Tsuyoshi Gary Watanabe, Tsutomu Shimokawa, Andrew R. Neureuther, Takanori Nakano, Lei Yuan, Kazuo Taira, Seiji Nagahara, Shiro Kusumoto, Yoshiyuki Kono, Atsushi Sekiguchi
Publikováno v:
SPIE Proceedings.
The quencher mechanisms in Chemically-Amplified (CA) resists have been investigated. To explain the acid distribution with a variety of acid strengths in the presence of quencher, a new full Acid-Equilibrium-Quencher model (AEQ model) is proposed and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4315b819a2c6bac9e8248e447b85c924
https://doi.org/10.1117/12.598949
https://doi.org/10.1117/12.598949
