Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Tsutomu Shimayama"'
Autor:
Yosuke Motoyama, Seigou Sakai, Takuma Fujii, Takashi Yamazaki, Kan Shimizu, Tsutomu Shimayama, Koji Tanaka, Takayoshi Kato, Chiaki Kon, Koichi Hashikaki, Yasuhiro Nakano
Publikováno v:
SID Symposium Digest of Technical Papers. 49:613-616
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8cae12d550d3cf6613b8560c86c2b279
https://doi.org/10.1002/sdtp.12407
https://doi.org/10.1002/sdtp.12407
Autor:
Seigou Sakai, Takayoshi Kato, Takuma Fujii, Koji Tanaka, Takashi Yamazaki, Tsutomu Shimayama, Yosuke Motoyama, Yasuhiro Nakano, Koichi Hashikaki, Kan Shimizu, Chiaki Kon
Publikováno v:
Journal of the Society for Information Display. 26:178-186
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9cd91abd5cd14c659b199d17269e309c
https://doi.org/10.1002/jsid.656
https://doi.org/10.1002/jsid.656
Autor:
Kunitoshi Tajima, Seiji Samukawa, Shingo Kadomura, Tsutomu Shimayama, Masaki Yoshimaru, Noriaki Matsunaga, Hisashi Yano, Shigeo Yasuhara, T. Sasaki
Publikováno v:
Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::199a8378ce4d1eecd6ae27f9994c7b46
https://doi.org/10.7567/ssdm.2010.h-5-2
https://doi.org/10.7567/ssdm.2010.h-5-2
Autor:
Shigeo Yasuhara, Shingo Kadomura, Kunitoshi Tajima, Tsutomu Shimayama, Seiji Samukawa, Toru Sasaki, Hisashi Yano, Noriaki Matsunaga, Masaki Yoshimaru
Publikováno v:
2010 IEEE International Interconnect Technology Conference.
We investigated a pulse-time-modulated neutral-beam-enhanced CVD at a low substrate temperature of -70°C with dimethoxy-tetramethyl-disiloxane to form low-k SiOCH film. This method provided an ultimate low-k SiOCH film with a k-value of 1.3, a suffi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d441f1b0fbf61c594a0004030b008faf
https://doi.org/10.1109/iitc.2010.5510729
https://doi.org/10.1109/iitc.2010.5510729
Autor:
Shigeo Yasuhara, T. Sasaki, Shingo Kadomura, Masaki Yoshimaru, Noriaki Matsunaga, Hisashi Yano, Tsutomu Shimayama, Kunitoshi Tajima, Seiji Samukawa
Publikováno v:
Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc42d87875cc21903ffe1ac6255beb59
https://doi.org/10.7567/ssdm.2009.d-8-5
https://doi.org/10.7567/ssdm.2009.d-8-5
Autor:
Shingo Kadomura, Hisashi Yano, Shigeo Yasuhara, Noriaki Matsunaga, Masaki Yoshimaru, Tsutomu Shimayama, Toru Sasaki, Seiji Samukawa, Kunitoshi Tajima
Publikováno v:
Journal of Physics D: Applied Physics. 43:065203
We developed a neutral-beam-enhanced method of chemical vapour deposition (NBECVD) to obtain a lower dielectric constant for the SiOCH interlayer dielectric film while maintaining a reasonable modulus. We achieved a higher deposition rate than that w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::58e6843bca2c28da4dad4dbff0681f32
https://doi.org/10.1088/0022-3727/43/6/065203
https://doi.org/10.1088/0022-3727/43/6/065203