Zobrazeno 1 - 10
of 40
pro vyhledávání: '"Tsuneo Takeuchi"'
Autor:
Tsuneo Takeuchi
Publikováno v:
Resilient Policies in Asian Cities ISBN: 9789811385988
Based on the data from the Great East Japan Earthquake, I have assessed the prevention (e.g., recovery from blackouts), adaptation (e.g., restoration of thermal power stations), and conversion (conversion into distributed energy systems) with the mul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cfd097769a75a8d938d85042b867c6c9
https://doi.org/10.1007/978-981-13-8600-8_7
https://doi.org/10.1007/978-981-13-8600-8_7
Autor:
Yusuke Hayashi, Tsuneo Takeuchi, M. Tagami, M. Abe, Makoto Ueki, N. Furutake, Shuichi Saito, M. Narihiro, Munehiro Tada, T. Onodera, Naoya Inoue, H. Yamamoto, Fuminori Ito
Publikováno v:
IEEE Transactions on Electron Devices. 56:1579-1587
A low oxygen content (LOC) CuAl alloy with no barrier metal (Ta) oxidation was obtained using an oxygen absorption process based on metallurgical thermodynamic principles. LOC CuAl dual damascene interconnects (DDIs) were successfully implemented int
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::853b6d9945ed7d915af1b46f17568007
https://doi.org/10.1109/ted.2009.2022677
https://doi.org/10.1109/ted.2009.2022677
Autor:
Noriko Sugiyama, Tsuneo Takeuchi
Publikováno v:
The Journal of Environment & Development. 17:424-441
Local climate change policy making in Japan started in the middle of the 1990s. The national government's Global Warming Law and the Kyoto Protocol Target Achievement Plan both include expectations that the 47 prefectural and 1,800 municipal governme
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::328c98102d6094381b3e686f0842564f
https://doi.org/10.1177/1070496508326128
https://doi.org/10.1177/1070496508326128
Autor:
M. Abe, Shuichi Saito, Tsuneo Takeuchi, M. Ueki, J. Kawahara, Munehiro Tada, Naoya Furutake, Hiroto Ohtake, M. Tagami, N. Inoue, H. Yamamoto, Fuminori Ito, Yoshihiro Hayashi
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 21:469-480
High performance Cu dual-damascene (DD) interconnects without process-induced damages are developed in porous SiOCH stacks with the effective dielectric constant (keff) of 2.95, in which a carbon (C)-rich molecular-pore-stacking (MPS) SiOCH film (k =
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe3d143f67c0ff1497d66cedd684f8a2
https://doi.org/10.1109/tsm.2008.2001225
https://doi.org/10.1109/tsm.2008.2001225
Autor:
Yoshihiro Hayashi, Tsuneo Takeuchi, Fuminori Ito, Naoya Inoue, Naoya Furutake, Hironori Yamamoto
Publikováno v:
Japanese Journal of Applied Physics. 47:2468-2472
Impact of barrier metal sputtering on physical and chemical damages in the low-k SiOCH films is investigated. In RF sputtering system, the potential drop across the anode sheath accelerates the ion in the plasma toward the wafer surface, inducing dam
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dbcb6d83f0c4ed82727fb21a1e717ca6
https://doi.org/10.1143/jjap.47.2468
https://doi.org/10.1143/jjap.47.2468
Autor:
Fuminori Ito, Hiroto Ohtake, Noriaki Oda, K. Arai, Munehiro Tada, Tsuneo Takeuchi, Yoshiko Kasama, M. Narihiro, T. Taiji, Yoshihiro Hayashi, M. Sekine, N. Furutake
Publikováno v:
IEEE Transactions on Electron Devices. 54:797-806
A feasibility study was done for 45-nm-node Cu interconnects using a novel molecular-pore-stacking (MPS) SiOCH film (k = 2.45), taking electron scattering in the scaled-down Cu lines into consideration. The as-deposited MPS SiOCH film, formed by plas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a795447bc01edbf24f6d176201846341
https://doi.org/10.1109/ted.2007.892357
https://doi.org/10.1109/ted.2007.892357
Autor:
Sachiko Narikiyo, Tsuneo Takeuchi
Publikováno v:
Journal of Human Environmental Studies. 5:69-75
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de822933fb08c5e21297073cc27de18e
https://doi.org/10.4189/shes.5.2_69
https://doi.org/10.4189/shes.5.2_69
Autor:
Noriko Sugiyama, Tsuneo Takeuchi
Publikováno v:
Journal of Human Environmental Studies. 5:51-60
Many past studies on climate policy have pointed out that scientists appealed global change problems to policy makers for the first time in 1985 in Villach, and the recommendation to address setting the country's reduction targets at the Toronto Conf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2e2b81d8177c620bf789c3a4393100b4
https://doi.org/10.4189/shes.5.2_51
https://doi.org/10.4189/shes.5.2_51
Autor:
Tsuneo Takeuchi, Kenichiro Hijioka, Yoshihiro Hayashi, Naoya Inoue, Shuichi Saito, Makoto Ueki, T. Tamura, M. Narihiro, M. Abe, Hiroto Ohtake, Naoya Furutake, T. Onodera, Fuminori Ito, M. Sekine, K. Arai, Munehiro Tada, M. Suzuki, M. Tagami
Publikováno v:
IEEE Transactions on Electron Devices. 53:1169-1179
Robust porous low-k/Cu interconnects have been developed for 65-nm-node ultralarge-scale integrations (ULSIs) with 180-nm/200-nm pitched lines and 100-nm diameter vias in a single damascene architecture. A porous plasma-enhanced chemical vapor deposi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::032f5f8a2d78fdd201443e2a987bb4ce
https://doi.org/10.1109/ted.2006.872095
https://doi.org/10.1109/ted.2006.872095
Publikováno v:
IEEE Transactions on Electron Devices. 49:1572-1579
We have investigated Pb(Zr,Ti)O/sub 3/ (PZT) film composition suitable for highly reliable ferroelectric RAM (FeRAM) application. To obtain a wide operational margin for 2T/2C (two transistors and two capacitors) FeRAMs, the PZT film capacitor is nee
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::83785ec03794e0d930bf0484bbe08610
https://doi.org/10.1109/ted.2002.802649
https://doi.org/10.1109/ted.2002.802649