Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Tsunehisa Tanaka"'
Autor:
Kouji Sasada, Ariko Takashima, Yumiko Doi, Kazunori Oishi, Noriko Inasaki, Tomoharu Matsukura, Michio Mizuki, Masuo Morita, Hideki Tani, Yumiko Saga, Mika Fujikawa, Toshimi Tomizawa, Masatsugu Obuchi, Masae Itamochi, Takako Kakiuchi, Isamu Motoi, Mayuri Nakagawa, Chieko Mitsui, Takahisa Shimada, Eriko Seki, Tomoko Takeuchi, Tomoko Ishikawa, Toru Takamori, Tsunehisa Tanaka
Publikováno v:
Japanese Journal of Infectious Diseases. 74:255-258
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::61a0d30add591efaf3d721d6e3d90c96
https://doi.org/10.7883/yoken.jjid.2020.830
https://doi.org/10.7883/yoken.jjid.2020.830
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 141:125-133
We developed a Micro Electro‐Mechanical Systems ultrasonic array sensor that is capable of detecting 1 MHz airborne ultrasonic waves for use in devices for inspecting the interior of objec...
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08a3b3e61ac5506c2d1c3c4a1b1987c0
https://doi.org/10.1541/ieejsmas.141.125
https://doi.org/10.1541/ieejsmas.141.125
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 139:88-94
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f59e135624b89e39eb3b980819b35d4f
https://doi.org/10.1541/ieejsmas.139.88
https://doi.org/10.1541/ieejsmas.139.88
Publikováno v:
Sensors and Actuators A: Physical. 171:191-198
Capacitive micromachined ultrasonic transducers (CMUTs) with a perforated membrane have been fabricated and characterized in air. Two types of CMUT device have been fabricated having perforation ratio (area ratio of holes = AR) of 10% and 20%, and an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::725c9e6ee62a8e7ec98c4fc9497bf6bc
https://doi.org/10.1016/j.sna.2011.08.021
https://doi.org/10.1016/j.sna.2011.08.021
Autor:
Tsunehisa Tanaka, Masanori Okuyama, Katsuhide Furukawa, Koji Inoue, Seiji Aoyagi, Kaoru Yamashita
Publikováno v:
Japanese Journal of Applied Physics. 46:4595-4601
In this paper, we reports the development of a miniaturized capacitive ultrasonic sensor with a Parylene diaphragm using a micromachining technique. Since the polymer diaphragm is flexible and nonbrittle, good sensitivity and durability are expected.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c6c321dd07555d53f6f9195ba3bc618
https://doi.org/10.1143/jjap.46.4595
https://doi.org/10.1143/jjap.46.4595
Publikováno v:
Sensors and Actuators A: Physical. 125:242-248
Stress and sensitivity of arrayed ultrasonic sensors utilizing piezoelectric thin film (lead–zirconate–titanate film: Pb(Zr0.52Ti0.48)O3) having composite membrane structure are demonstrated. Due to different thermal and elastic characteristics o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::97b5d3472003ebee9e4de70c47025edb
https://doi.org/10.1016/j.sna.2005.08.011
https://doi.org/10.1016/j.sna.2005.08.011
Publikováno v:
Sensors and Actuators A: Physical. 119:405-411
Arrayed ultrasonic transducers using the piezoelectric thin film (PZT) are fabricated with multilayer diaphragm structures. Due to the different thermal and elastic characteristics of each constitutive layer, residual stress is generated during high
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8217a3bb7b5ad9d06a4f7961983448d
https://doi.org/10.1016/j.sna.2004.10.026
https://doi.org/10.1016/j.sna.2004.10.026
Autor:
Kaoru Yamashita, Yoshihiko Suzuki, Shigeru Arita, Koji Inoue, Akira Tsuchitani, Masanori Okuyama, Yaowu Mo, Tsunehisa Tanaka
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 125:188-195
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3c75fc91d4a2413fd9c2d705aeff6d5
https://doi.org/10.1541/ieejsmas.125.188
https://doi.org/10.1541/ieejsmas.125.188
Autor:
Seiji Aoyagi, Kaoru Yamashita, Arporn Teeramongkonrasmee, Tsunehisa Tanaka, Hiromi Miyoshi, Yoshihiko Suzuki, Masanori Okuyama
Publikováno v:
Japanese Journal of Applied Physics. 43:7207-7212
We report the deposition of Pb(Zr0.52Ti0.48)O3 (PZT) thick films on Pt/Ti/SiO2/Si substrates using a multilayer process to suppress the problem of crack formation due to thermal stress. The thickness dependences of film structure, ferroelectric and d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cdaae574d73e3cb1e6c25b2393aa5bf4
https://doi.org/10.1143/jjap.43.7207
https://doi.org/10.1143/jjap.43.7207
Autor:
Tsunehisa Tanaka, Koji Inoue, Akira Tsuchitani, Shigeru Arita, Yoshihiko Suzuki, Kaoru Yamashita, Yaowu Mo
Publikováno v:
Sensors and Actuators A: Physical. 101:203-211
Micromachined ultrasonic sensors are promising in the applications including medical imaging, non-destructive evaluation (NDE), ranging, and object detections. Bucket brigade device (BBD) was used as the analog beam former for piezoelectric micromach
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1081b8910b6afb2daac81934c356abfd
https://doi.org/10.1016/s0924-4247(02)00216-9
https://doi.org/10.1016/s0924-4247(02)00216-9