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This paper presents analytical modeling and design of a high-acceleration, low-vibration slotless double-sided linear motor with an arbitrary Halbach array for lithography machines used in semiconductor manufacturing technology. Amperian current and
Externí odkaz:
http://arxiv.org/abs/2312.04053
Autor:
DeRidder, Louis B., Hare, Kyle A., Lopes, Aaron, Jenkins, Josh, Fitzgerald, Nina, MacPherson, Emmeline, Fabian, Niora, Morimoto, Josh, Chu, Jacqueline N., Kirtane, Ameya R., Madani, Wiam, Ishida, Keiko, Kuosmanen, Johannes L.P., Zecharias, Naomi, Colangelo, Christopher M., Huang, Hen-Wei, Chilekwa, Makaya, Lal, Nikhil B., Srinivasan, Shriya S., Hayward, Alison M., Wolpin, Brian M., Trumper, David, Quast, Troy, Rubinson, Douglas A., Langer, Robert, Traverso, Giovanni
Publikováno v:
In Med 12 July 2024 5(7):780-796
Autor:
Kant, Krishan, Weinreb, Benjamin S., Hegy, Michael, Speakman, Jeff, Gartner, Mark, Trumper, David L.
Publikováno v:
In Mechatronics April 2023 90
Publikováno v:
In IFAC PapersOnLine 2022 55(27):323-328
Akademický článek
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Publikováno v:
In Precision Engineering July 2021 70:63-69
Autor:
Calvet, Nicolas, Slocum, Alexander H., Gil, Antoni, Grange, Benjamin, Lahlou, Radia, Hamer, Tyler T., Diago, Miguel, Tetreault-Friend, Melanie, Codd, Daniel S., Trumper, David L., Armstrong, Peter R.
Publikováno v:
In Solar Energy 15 May 2021 220:217-229
Autor:
Zhang, Jianbo, Huang, Yu-Ja, Yoon, Jun Young, Kemmitt, John, Wright, Charles, Schneider, Kirsten, Sphabmixay, Pierre, Hernandez-Gordillo, Victor, Holcomb, Steven J., Bhushan, Brij, Rohatgi, Gar, Benton, Kyle, Carpenter, David, Kester, Jemila C., Eng, George, Breault, David T., Yilmaz, Omer, Taketani, Mao, Voigt, Christopher A., Carrier, Rebecca L., Trumper, David L., Griffith, Linda G.
Publikováno v:
In Med 15 January 2021 2(1):74-98
Autor:
Yoon, Jun Young, Trumper, David L.
Publikováno v:
In Precision Engineering January 2019 55:101-109
Autor:
Trumper, David Lippincott
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.
Includes bibliographical references (leaves 256-263).
by David Lippincott Trumper.
Ph.D.
Includes bibliographical references (leaves 256-263).
by David Lippincott Trumper.
Ph.D.