Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Toyoki Kitayama"'
Publikováno v:
Applied optics. 14(2)
The dye-sensitized photopolymerization of acrylamide was investigated in order to obtain new holographic recording media that have high diffraction efficiency and a long photosensitive life. The characteristics of the photosensitive system, containin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5d99b23f314d5666ca82ce5c244f6705
https://pubmed.ncbi.nlm.nih.gov/20134894
https://pubmed.ncbi.nlm.nih.gov/20134894
Autor:
Toyoki Kitayama, K. Uda, Mitsuaki Amemiya, Hiroshi Watanabe, Yutaka Watanabe, Koji Kise, Kenji Itoga, Hiroaki Sumitani, Kenji Marumoto, Teruhiko Kumada
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20:2953
Second generation proximity x-ray lithography (PXL-II), which uses shorter incident x-ray wavelengths and resist materials, is expected to be a candidate for next generation lithography. In the PXL-II technique, the x-ray wavelength absorbed in the r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99914e385ffb0b4963a6d03998fdd8ec
https://doi.org/10.1116/1.1520565
https://doi.org/10.1116/1.1520565
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19:2423
We report on the results of our effort to extend proximity x-ray lithography (PXL) to 35 nm using a harder energy spectrum, and choosing the appropriate materials for the mask and the resist to match the transmission and absorption at higher energies
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::82bf381c12b3bc5c47615bc6c6ab5566
https://doi.org/10.1116/1.1418407
https://doi.org/10.1116/1.1418407
Autor:
Toyoki Kitayama, Mitsuaki Amemiya, Hiroaki Sumitani, Kenji Itoga, Yutaka Watanabe, Kenji Marumoto
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19:2439
Proximity x-ray lithography using harder spectra has been proposed as a next generation lithography technology. The secondary electron from the substrate is one of the issues that should be solved to realize this technology. We investigated the effec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed06dce36e9e81f0b1f50cd9fc629375
https://doi.org/10.1116/1.1420534
https://doi.org/10.1116/1.1420534
Autor:
Toyoki Kitayama
Publikováno v:
Journal of the Spectroscopical Society of Japan. 37:218-228
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65ec27f4bcd7cd0606e6a3fbae45710e
https://doi.org/10.5111/bunkou.37.218
https://doi.org/10.5111/bunkou.37.218
Publikováno v:
Microelectronic Engineering. 2:281-298
An Ag/Se-Ge inorganic resist technology is applied to photolithographic processes in LSI fabrication. This paper describes exposure latitude, RIE characteristics, resist fabrication and exposure throughputs, pattern alignment, defocus tolerances and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c38c35aa202b62d3e1c89cd566846a8
https://doi.org/10.1016/0167-9317(84)90006-6
https://doi.org/10.1016/0167-9317(84)90006-6
Publikováno v:
Journal of Applied Physics. 53:4328-4332
A binary system consisting of polyvinylidene fluoride (PVDF) and lead zirconate titanate (PZT) powder was investigated to determine its dielectric constant, piezoelectric constant, and Young’s modulus. An expression was obtained for the piezoelectr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0259843a4fae3b8c64c3b071c024c9d
https://doi.org/10.1063/1.331211
https://doi.org/10.1063/1.331211
Autor:
Toyoki Kitayama, Yamada Takeshi
Publikováno v:
Journal of Applied Physics. 52:6859-6863
The ferroelectric properties of vinylidene fluoride‐trifluoroethylene copolymers were studied. According to the x‐ray diffraction patterns, the crystalline form of the copolymers with VDF molar content less than 80% was different from that of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb93ead2ccc9decda5f505f151a4c355
https://doi.org/10.1063/1.328679
https://doi.org/10.1063/1.328679
Publikováno v:
Journal of Applied Physics. 52:948-952
The ferroelectric properties of vinylidene fluoride‐trifluoroethylene copolymer were studied. The infrared absorption spectra and x‐ray diffraction patterns of the melt‐crystallized film suggested the similar crystalline form to the polar form
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4f025149190d0fcf0183f631cb0689f
https://doi.org/10.1063/1.328783
https://doi.org/10.1063/1.328783
Autor:
Toyoki Kitayama, Hiroki Yamazaki
Publikováno v:
Ferroelectrics. 33:147-153
A sensitive pyroelectric material has been obtained by putting ferroelectric powders into the matrix of polymer. As ferroelectric powders, PbTiO3, and PZT were used. Poly(ethylene) and Poly(vinylidene fluoride) were tested for the matrix polymer. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eaffa69b87ddadbd880840d10469de47
https://doi.org/10.1080/00150198108008080
https://doi.org/10.1080/00150198108008080