A New Method for Treating Fluorine Wastewater to Reduce Sludge and Running Costs.

Autor: Toyoda, Ara, Taira, Tsutomu

Publikováno v: IEEE Transactions on Semiconductor Manufacturing. Aug2000, Vol. 13 Issue 3, p305. 5p. 2 Black and White Photographs, 4 Diagrams, 3 Charts, 3 Graphs.