Zobrazeno 1 - 10
of 58
pro vyhledávání: '"Toublan, Olivier"'
Publikováno v:
In Microelectronic Engineering 2009 86(4):492-496
Autor:
Kato, Kokoro, Zine el abidine, Nacer, Sundermann, Frank, Yesilada, Emek, Ndiaye, El Hadji Omar, Mishra, Kushlendra, Paninjath, Sankaranarayanan, Bork, Ingo, Buck, Peter, Toublan, Olivier, Schanen, Isabelle
Publikováno v:
Photomask Japan 2014
Photomask Japan 2014, Jul 2014, Yokohama, Japan. pp.925603, ⟨10.1117/12.2069977⟩
Photomask Japan 2014, Jul 2014, Yokohama, Japan. pp.925603, ⟨10.1117/12.2069977⟩
Standard OPC models consist of a physical optical model and an empirical resist model. The resist model compensates the optical model imprecision on top of modeling resist development. The optical model imprecision may result from mask topography eff
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ea2c0b362eaf6ce0a099a40cf04a70b3
https://doi.org/10.1117/12.2069977
https://doi.org/10.1117/12.2069977
Autor:
Lucas, Kevin, Patterson, Kyle, Boone, Robert, Miramond, Corinne, Borjon, Amandine, Belledent, Jerome, Toublan, Olivier, Entradas, Jorge, Trouiller, Yorick
Publikováno v:
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61560R-61560R-12, 12p
The influence of calibration pattern coverage for lumped parameter resist models on OPC convergence.
Publikováno v:
Proceedings of SPIE; Nov2006, Issue 1, p615619-615619-8, 8p
Publikováno v:
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p599234-599234-10, 10p
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p320-329, 10p
Autor:
Borjon, Amandine, Belledent, Jerome, Shang, Shumay D., Toublan, Olivier, Miramond, Corinne, Patterson, Kyle, Lucas, Kevin, Couderc, Christophe, Rody, Yves, Sundermann, Frank, Urbani, Jean-Christophe, Baron, Stanislas, Trouiller, Yorick, Schiavone, Patrick
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p1190-1201, 12p
Autor:
Word, James, Belledent, Jerome, Trouiller, Yorick, Granik, Yuri, Toublan, Olivier, Maurer, Wilhelm
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p1209-1219, 11p
Autor:
Postnikov, Sergei V., Robert, Emilien, Thony, Philippe, Patterson, Kyle, Warrick, Scott, Henry, Daniel, Torres, Andres, Toublan, Olivier
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p1478-1484, 7p
Autor:
Lucas, Kevin, Baron, Stanislas, Belledent, Jerome, Boone, Robert, Borjon, Amandine, Couderc, Christophe, Patterson, Kyle, Riviere-Cazaux, Lionel, Rody, Yves, Sundermann, Frank, Toublan, Olivier, Trouiller, Yorick, Urbani, Jean-Christophe, Wimmer, Karl
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p85-96, 12p