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pro vyhledávání: '"Toshitaka Shimomura"'
Autor:
Fujio Maeda, Toshitaka Shimomura, Yoshio Saruki, Shinichiro Aoyagi, Masaji Sawabe, Hisayoshi Sakai, Yasuyuki Yamaryo
Publikováno v:
SPIE Proceedings.
encorders and scales up to 1600mm. In the comparator, the interferometer is fully arranged in vacuum and the calibrationobjects are mounted under atmospheric conditions. The Abbe's principle in the alignment of workpiece with the measuringbeam is sat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db02d5444944a67a93bde69249703306
https://doi.org/10.1117/12.484567
https://doi.org/10.1117/12.484567
