Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Toshitada Takeuchi"'
Autor:
Takashi Kaito, Masanao Munekane, Toshiharu Kogure, Yukimitsu Kijima, Tatsuya Asahata, Masakatsu Hasuda, Toshitada Takeuchi, Toshiaki Fujii, Koji Iwasaki, Masahiro Kiyohara
Publikováno v:
Journal of Micromechanics and Microengineering. 15:S286-S291
A focused ion beam (FIB) system is process equipment used to make a wide variety of small structures of various materials by irradiating a focused gallium ion beam of nanometer-order diameter to a surface of specimens and by utilizing spattering etch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9650020bf5206e8fe3fd8187a6ab502a
https://doi.org/10.1088/0960-1317/15/10/s06
https://doi.org/10.1088/0960-1317/15/10/s06
Autor:
Björn Wannberg, Toshitada Takeuchi, Osamu Takaoka, Akira Yonezawa, Seiji Morita, Masayuki Maruo, Mitsuyoshi Sato, Akiyoshi Noguchi
Publikováno v:
Journal of Electron Microscopy. 51:149-156
This report describes the characteristics for the development of a compound lens that consists of a single pole-piece objective lens and an electrostatic bipotential lens. By applying a relatively small voltage of around 1 kV to the specimen and the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f172991d0b0cd08c88f733436d177a80
https://doi.org/10.1093/jmicro/51.3.149
https://doi.org/10.1093/jmicro/51.3.149
Autor:
Koji Iwasaki, Masakatsu Hasuda, Tatsuya Asahata, Masanao Munekane, Yo Yamamoto, Hiromi Tashiro, Toshiaki Fujii, Masahiro Kiyohara, Takashi Kaito, Yutaka Ikku, Toshitada Takeuchi
Publikováno v:
MRS Proceedings. 983
Focused Ion Beam (FIB) system is equipment used to make a wide variety of micro and Nano structures. Structures can be created using various materials by irradiating focused gallium ion beam on to the surface of specimens and by sputtering, etching a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::668e6cb13cb50f3465a3a6c5829282f9
https://doi.org/10.1557/proc-983-0983-ll08-08
https://doi.org/10.1557/proc-983-0983-ll08-08