Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Toshiki Okui"'
Publikováno v:
SPIE Proceedings.
Micro Electro Mechanical Systems (MEMS) is a three-dimensional micro-fabrication technology based on photolithography. The fields of application are extensive and wide-ranging. Among the applications, those that have already acquired a large market i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e425dbd7ce7dcf38a674da00b11968a
https://doi.org/10.1117/12.656249
https://doi.org/10.1117/12.656249
