Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Toshihito Hiruta"'
Publikováno v:
AIP Conference Proceedings.
The transition between the capacitively coupled plasma (CCP) and the inductively coupled plasma (ICP) was investigated with the internal radio frequency (RF) multi-turn antenna. The transition between them showed the hysteresis curve. The radiation p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7bd656e726d894e3cb0533347f762df
https://doi.org/10.1063/1.4737570
https://doi.org/10.1063/1.4737570
Autor:
Shunya Naitoh, Hideyuki Sugibayashi, Toshihiko Yamauchi, Yoshinori Kanno, Toshihito Hiruta, Toshiyuki Tachibana, Seiji Kobayashi
Publikováno v:
Japanese Journal of Applied Physics. 51:01AA02
The transitions between capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) were investigated using chemical vapor deposition (CVD) plasma with the internal RF multiturn antenna. The typical electron densities of both 1015/m3 in CC
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::21546fb2fa8db7a257dd70e3fc33ff0e
https://doi.org/10.7567/jjap.51.01aa02
https://doi.org/10.7567/jjap.51.01aa02