Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Toshihisa Kamiyama"'
Autor:
Naoyuki Taketoshi, Chihiro Tasaki, Yuzo Shigesato, Tetsuya Baba, Nobuto Oka, Toshihisa Kamiyama, Takashi Yagi
Publikováno v:
Netsu Bussei. 25:117-120
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:851-855
Nb-doped anatase TiO2 films were deposited on unheated glass by dc magnetron sputtering using slightly reduced Nb-doped TiO2−x targets (Nb concentration: 3.7 and 9.5 at. %) with various hydrogen or oxygen flow ratios. After postannealing in a vacuu
Publikováno v:
Thin Solid Films. 516:5758-5762
Nb-doped anatase TiO 2 films were deposited on unheated glass by dc magnetron sputtering using a slightly reduced TiO 2 − x target (2 − x = 1.986; conductivity, 3.7 S cm − 1 ; density, 4.21 g/cm 3 ) with Nb 2 O 5 pellets on it. After post-annea
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:903-907
Photocatalytic TiO2 films were deposited on glass substrates by dc magnetron sputtering using a slightly reduced TiO2−x target (2−x=1.986; conductivity, 3.7 S cm−1; density, 4.21 g/cm3). The variation in the deposition rate as a function of the
Publikováno v:
Thin Solid Films. 392:169-173
A new sputter method for high rate deposition of TiO 2 was developed for application to the common planar magnetron sputter system. In this method, DC power is applied to plasma sprayed TiO 2− X targets using a sputter gas of a few percent of O 2 d
Publikováno v:
MRS Proceedings. 1109
Nb-doped anatase TiO2 films were deposited on unheated glass by dc magnetron sputtering using a slightly reduced TiO2-x–Nb2O5-x target with oxygen flow ratios [O2/(Ar+O2)] in the range from 0.00 to 0.20%. After post-annealing in a vacuum (6 × 10
Autor:
Chihiro Tasaki, Shin-ichi Nakamura, Naoyuki Taketoshi, Nobuto Oka, Takashi Yagi, Yuzo Shigesato, Tetsuya Baba, Toshihisa Kamiyama
Publikováno v:
Japanese Journal of Applied Physics. 51:035802
The thermophysical properties of Nb-doped TiO2 (Nb:TiO2) films were studied in terms of electrical conductivity and Nb concentration. The thermal diffusivity of Nb:TiO2 films with various Nb concentrations was investigated and found to range from (1.