Výsledky vyhledávání - "Toshihiko Tanaka, Toshihiko Tanaka"

Periodical

Roles of Surface Functional Groups on TiN and SiN Substrates in Resist Pattern Deformations

Autor: Yamanaka, Ryoko, Mine, Toshiyuki, Toshihiko Tanaka, Toshihiko Tanaka, Tsuneo Terasawa, Tsuneo Terasawa

Publikováno v: Japanese Journal of Applied Physics; December 1997, Vol. 36 Issue: 12 p7620-7620, 1p

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Periodical

Investigation of Resist Pattern Deformation in Chemical Amplification Resists on SiNxSubstrates

Autor: Yamanaka, Ryoko, Hattori, Takashi, Mine, Toshiyuki, Toshihiko Tanaka, Toshihiko Tanaka

Publikováno v: Japanese Journal of Applied Physics; December 1995, Vol. 34 Issue: 12 p6794-6794, 1p

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