Zobrazeno 1 - 1
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pro vyhledávání: '"Toshihide Oba"'
Autor:
Toshihide Oba, Hidemitsu Hakii, Takayuki Nakamura, Jun Matsumoto, Isao Yonekura, Keishi Tanaka, Masaru Higuchi, Toshimichi Iwai, Yoshiaki Ogiso
Publikováno v:
SPIE Proceedings.
In order to analyze small reticle defects quantitatively, we have developed a function to measure differences in two patterns using contour data extracted from SEM images. This function employs sub-pixel contour data extracted with high accuracy to q
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28f1059cbe3d84eed0cebe6dd0dce539
https://doi.org/10.1117/12.833405
https://doi.org/10.1117/12.833405
