Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Toshiaki Monnaka"'
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 119:593-598
Publikováno v:
Applied Surface Science. :536-539
The thickness of the film deposited by a new off-axis pulsed laser deposition method using an aperture plate is studied by observing the laser plume using a streak camera. Interestingly, it appears that the oxygen pressure dependence of the film thic
Autor:
M. Murahara, M. Tomita, T. Ikegame, S. Itoh, K. Hatao, Itsuo Nagata, H. Niino, A. Yabe, J. Krager, W. Kaütek, M. YODA, N. MUKAI, M. KIMURA, S. OKADA, T. KONAGAI, N. HAYASHIA, H. HOZUMI, H. IGAKURA, Y. TOGASAWA, M. OCHIAI, J. SENBOSHI, M. KIKUNAGA, K. SATO, M. OBATA, K. ASANO, S. NAKAYAMA, Y. SANO, H. TAKAHASHI, T. Mori, M. Motizuki, K. Nakada, T. Okamoto, T. Suzuki, T. Ueda, T. Makimura, K. Murakami, Taro Ninomiya, Toshiaki Monnaka, Narumi Inoue, Shigeru Kashiwabara, T. Sato, T. Kadomura, D. Watanabe, H. Okado, K. Toyoda, S. Nakajima, S. Kondo, J. Morimoto, N. Toshima, T. Kumita, T. Hashizume, K. Makino, T. Mizuta, S. Tokunaga, S. Yoshihara, J. Kawanaka, J. Yokotani, K. Kurosawa, S. Kubodera, W. Sasaki, Jie Zhang, Koji Sugioka, Satoshi Wada, Hideo Tashiro, Koichi Toyoda, Takahisa Itsuno, Katsumi Midorikawa, Y P Kathuria
Publikováno v:
The Review of Laser Engineering. 26:115-124,129
Publikováno v:
SHINKU. 41:183-185
Publikováno v:
SPIE Proceedings.
A reduction is achieved in the number of droplets and/or large particles scattered on the surface of grown film deposited by the pulsed laser deposition method. An aperture plate is placed in front of the ablation target in order to block the scatter
Publikováno v:
Japanese Journal of Applied Physics. 36:704
A new off-axis pulsed laser deposition method using an aperture plate is proposed for the purpose of depositing high surface-quality Ta2O5 thin films without large fragments and/or droplets. The angular distribution of droplets and growth species emi