Zobrazeno 1 - 10 of 11 pro vyhledávání: '"Toshiaki Miyokawa"'
1
Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc
Autor: Susumu Takashima, Yuichi Aki, Motohiro Furuki, Date Naoki, Toshiaki Miyokawa, Minoru Takeda, Hiroshi Kawase, Mitsuru Koizumi, Masanobu Yamamoto
Publikováno v: Japanese Journal of Applied Physics. 42:759-763
We developed an electron beam recorder with a novel differential pumping head, which produces a local high-vacuum area for an electron beam by balancing nitrogen gas flow into and out of the head. Regarding recording speed, it was confirmed to be as
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a9c1ca2c6e19a598b44130c806052562
https://doi.org/10.1143/jjap.42.759
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2
[Untitled]
Autor: Michio MINATO, Yoshio ITOH, Shingo ICHIMURA, Kiyohide KOKUBUN, Masahiro HIRATA, Sonoko TSUKAHARA, Kazuya SAITO, Yoshinao IKEDA, Yoshio SAITO, Kowashi WATANABE, Hiroshi SAEKI, Mitsuhiro MASAKI, Yasuaki SUZUKI, Yukiko TANIUCHI, Takashi NODA, Michio MAENO, Suck Hee BE, Haruo OHKUMA, Masahiro TOSA, Akira KASAHARA, Kazuhiro YOSHIHARA, Seiichiro KANNO, Hiroyuki KITSUNAI, Nobuo TSUMAKI, Masaaki NAKAYAMA, Hitoshi NISHIMURA, Kenji SHIRAI, Shinichi KOBAYASHI, Norio OGIWARA, Keiichi OHIRA, Takayuki SATO, Shinichiro MICHIZONO, Shigemi SUGINUMA, Migaku TAKAHASHI, Akio OKAMOTO, Toshikazu NOSAKA, Masaaki YOSHITAKE, Souichi OGAWA, Kazuhiko KOBAYASHI, Masatoshi NOGUCHI, Hidefumi NAKAJIMA, Hiroyuki OBARA, Hajime SAKAI, Yasuhiro OGOSHI, Takuro KOIKE, Hideo HASEGAWA, Yukio INOKUTI, Kazuhiro SUZUKI, Osamu OHKUBO, Natsuki TAKAHASHI, Masayuki TERAI, Norichika HASEGAWA, Masahiko OKUZAWA, Chuhei OSHIMA, Shigeki OTANI, Kenji ODAKA, Osamu SATOH, Yoshiro SHIOKAWA, Masakazu ICHIKAWA, Kenya AKAISHI, Kazuhiro EZAKI, Yusuke KUBOTA, Osamu MOTOJIMA, Masakatsu KITANI, Akira KUROKAWA, Hiroko KAJI, Kiminori KAKITANI, Yoichiro YAGI, Akio YOSHIMORI, Takanori AOKI, Shogo TODA, Kazuaki HAMAJI, Akio SUZUKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Daisuke TANAKA, Takeshi FUJIWARA, Mituaki MAEDA, Nobuhiko TAKEHARA, Mitsutaka HIKIDA, Yasuhiro IGASAKI, Akishige SATO, Masaru KITAGAWA, Yasunobu KURODA, Eiji KUSANO, Akira KINBARA, Taizo KAWAUCHI, Katsuyuki FUKUTANI, Tatsuo OKANO, Shunji KISHIMOTO, Xiaowei ZHANG, Toyosei KAWASAKI, Daisuke SAKAI, Hiroshi ITOH, Takeo ICHINOKAWA, Toshuu AN, Hiroshi KUBO, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Youiti YAMAMOTO, Toshiaki MIYOKAWA, Nobuaki TAMURA, Tadao MIURA, Touru SUMIYA, Haruko FUJINUMA, Shun-ichiro TANAKA, Hiroyuki YOSHIKI, Teruhiko TSUTSUI, Tetsu OKAMOTO, Seiichi WATANABE, Yukio OKAMOTO, Hiroki KAWADA, Kaoru IJIMA, Seigi MIZUNO, Saburo SHIMIZU, Koh FUWA, Seiji SEKI, Kazunobu HAYAKAWA, Heizo TOKUTAKA, Kazuyuki IWAMOTO, Kikuo FUJIMURA, Toru WATANABE, Satoru KISHIDA, Ken NAKAMURA, Yoshiyuki IGARI, Shinji ISHIDZUKA, Tetsuroh MINE, Tsuyoshi TAKAOKA, Tomohide TAKAMI, Isao KUSUNOKI, Akira HAYAMA, Kazuyoshi IMOTO, Takato HIRAYAMA, Ichiro ARAKAWA, Takashi ADACHI, Koichiro MITSUKE, Makoto SAKURAI, Takashi MOMOSE, Eishuu HAYASAKA, Katsuhiro SAITOU, Katsuya NAGAYAMA, Sin'ya ABE, Kunio OKIMURA, Naoki YASUMARU, Yukiko ABE, Sin-ichi IGARASHI, Yasuo IRIE, Katsumi SUZUKI, Eiji ROKUTA, Tomohiro HAYASHI, Atsushi ITO, Toshio SAKURAI, Masuaki MATSUMOTO, Natsuo TATSUMI, Tadashi ITOYAMA, Masaomi UMEZAWA
Publikováno v: SHINKU. 41:335-400
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::63593b5f240bc4211864c0e328b40265
https://doi.org/10.3131/jvsj.41.335
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3
Recent progress in electron beam mastering for 100Gb/in2and beyond
Autor: Masanobu Yamamoto, Mitsuru Koizumi, Minoru Takeda, Masataka Shinoda, Kimihiro Saito, Toshihiro Fujiki, Toshiaki Miyokawa, Motohiro Furuki, Masao Muto, Yuichi Aki
Publikováno v: SPIE Proceedings.
We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by exchanging the aperture size of the objective lens and beam stability were also improved by addi
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::041d629c25046c34d2fe935cf0ac8b09
https://doi.org/10.1117/12.562121
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6
Electron beam mastering process realized over a 100-GB/layer capacity disk
Autor: Minoru Takeda, Yuichi Aki, Mitsuru Koizumi, Masanobu Yamamoto, Hiroshi Kawase, Motohiro Furuki, Kimihiro Saito, Toshiaki Miyokawa, Masataka Shinoda, Masao Mutou
Publikováno v: Journal of Micro/Nanolithography, MEMS, and MOEMS. 3:545
We demonstrate the capability of 100-GB density recording by electron beam mastering and readout by a near-field optical pickup with an effective NA of 2.05 and a blue LD of 405-nm wavelength. A silicon (Si) disk of 100-GB density is fabricated by an
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::426760127bcc8aa940c136282104eef5
https://doi.org/10.1117/1.1793154
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7
Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
Autor: Yuichi Aki, Mitsuru Koizumi, Kimihiro Saito, Motohiro Furuki, Hiroshi Kawase, Masao Mutou, Masataka Shinoda, Toshiaki Miyokawa, Nobuo Handa, Minoru Takeda, Masanobu Yamamoto
Publikováno v: Japanese Journal of Applied Physics. 43:5044
We developed an electron beam recorder (EBR) capable of recording master discs under atmospheric conditions using a novel differential pumping head. Using the EBR and optimized fabrication process for Si-etched discs with reactive ion etching (RIE),
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6b4e13daa6cf68aad10a62e29ae69a85
https://doi.org/10.1143/jjap.43.5044
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8
Emission characteristics of a conical field emission gun
Autor: Toshiaki Miyokawa, Youiti Yamamoto
Publikováno v: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16:2871
Characteristics of a conical field emission gun (FEG) are measured and discussed. The field emission current from a W emitter is found to obey the Fowler–Nordheim (FN) equation. An expression was given describing the dependence of the mean work fun
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fd578fa4babff7fbe75def3fbba575d4
https://doi.org/10.1116/1.590286
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9
Akademický článek
Electron beam mastering process realized over a 100-GB/layer capacity disk.
Autor: Takeda, Minoru, Furuki, Motohiro, Yamamoto, Masanobu, Shinoda, Masataka, Saito, Kimihiro, Aki, Yuichi, Kawase, Hiroshi, Koizumi, Mitsuru, Miyokawa, Toshiaki, Mutou, Masao
Publikováno v: Journal of Micro/Nanolithography, MEMS & MOEMS; Oct2004, Vol. 3 Issue 4, p545-549, 5p
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10
Conference
Electron beam recording with a novel differential pumping head realizing over 50 GB/layer capacity disc.
Autor: Takeda, M., Furuki, M., Yamamoto, M., Aki, Y., Kawase, H.
Publikováno v: International Symposium on Optical Memory & Optical Data Storage Topical Meeting; 2002, p18-20, 3p
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