Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Toshiaki Eguchi"'
Autor:
Syouichi Tsukiyama, Kouichiro Kouge, Tatsuya Yanagida, Kiichiro Uchino, Hakaru Mizoguchi, Katsunobu Nishihara, Yasunori Wada, Hiroaki Tomuro, Toshiaki Eguchi, Atsushi Sunahara, Takeshi Kodama, Georg Soumagne, Yuta Sato, Masahito Kunishima, Kentaro Tomita
Publikováno v:
Scientific Reports
Scientific Reports, Vol 7, Iss 1, Pp 1-7 (2017)
Scientific Reports, Vol 7, Iss 1, Pp 1-7 (2017)
Time-resolved two-dimensional (2D) profiles of electron density (ne) and electron temperature (Te) of extreme ultraviolet (EUV) lithography light source plasmas were obtained from the ion components of collective Thomson scattering (CTS) spectra. The
Autor:
Tatsuya Yanagida, Toshiaki Eguchi, Hakaru Mizoguchi, Takeshi Kodama, Syoichi Tsukiyama, Hiroaki Tomuro, Yasunori Wada, Kouichiro Kouge, Kiichiro Uchino, Kentaro Tomita, Yuta Sato, Masahito Kunishima
Publikováno v:
Japanese Journal of Applied Physics. 56:036201
Spatial profiles of the electron density (n e), electron temperature (T e), and average ionic charge (Z) of laser-produced Sn plasmas for EUV lithography, whose conversion efficiency (CE) is sufficiently high for practical use, were measured using a
Autor:
Yuta Sato, Kentaro Tomita, Syoichi Tsukiyama, Toshiaki Eguchi, Kiichiro Uchino, Kouichiro Kouge, Hiroaki Tomuro, Tatsuya Yanagida, Yasunori Wada, Masahito Kunishima, Takeshi Kodama, Hakaru Mizoguchi
Publikováno v:
Japanese Journal of Applied Physics; Mar2017, Vol. 56 Issue 3, p1-1, 1p
Autor:
Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Tsukasa Hori, Yutaka Shiraishi, Tatsuya Yanagida, Soumagne, Georg, Tsuyoshi Yamada, Takashi Saitou
Publikováno v:
Proceedings of SPIE; 7/29/2019, Vol. 11147, p1-14, 14p
Conference
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Conference
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Autor:
Mizoguchi, Hakaru, Tomuro, Hiroaki, Nishimura, Yuichi, Hosoda, Hirokazu, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Shiraishi, Yutaka, Yanagiga, Tatsuya, Soumagne, Georg, Iwamoto, Fumio, Nagai, Shinji, Ueno, Yoshifumi, Suganuma, Takashi, Niimi, Gouta, Yabu, Takayuki, Yamada, Tsuyoshi, Saitou, Takashi
Publikováno v:
Proceedings of SPIE; 7/5/2021, Vol. 11854, p118540K-118540K-18, 1p
Autor:
Felix, Nelson M., Lio, Anna, Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Tanak, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Shiraishi, Yutaka, Yanagida, Tatsuya, Sumangne, George, Yamada, Tsuyoshi, Saitou, Takashi
Publikováno v:
Proceedings of SPIE; 11/2/2020, Vol. 11609, p1160919-1160919, 1p
Autor:
Felix, Nelson M., Lio, Anna, Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Saitou, Takashi
Publikováno v:
Proceedings of SPIE; 1/21/2020, Vol. 11323, p113230X-113230X-14, 1p