Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Torsten M. Geppert"'
Autor:
Daniel Pergande, Benjamin Gesemann, Stefan L. Schweizer, Torsten M. Geppert, Ralf B. Wehrspohn, Susanne Moretton, Armin Lambrecht
Publikováno v:
Comptes Rendus Chimie. 16:51-58
Periodic silicon nanostructures can be used for different kinds of gas sensors depending on the analyte concentration. First, we present an optical gas sensor based on the classical non-dispersive infrared technique for ppm-concentration using ultra-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c12854c2daa7d2d8c5415460c8b22b24
https://doi.org/10.1016/j.crci.2012.05.011
https://doi.org/10.1016/j.crci.2012.05.011
Publikováno v:
ECS Transactions. 16:61-67
We present a method to create at the same time trenches and ordered macropore arrays during photo-electrochemical etching of n-type silicon. This novel method allows in situ separation of single devices with a submicrometer precision. The limits of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::555e89613312a24afd5fb97d901f21d3
https://doi.org/10.1149/1.2982542
https://doi.org/10.1149/1.2982542
Publikováno v:
physica status solidi (RRL) - Rapid Research Letters. 4:148-150
The precision of photo-electrochemical etching of perfectly-ordered macropores in single-crystalline silicon is limited by pore diameter fluctuations due to doping variations of the starting wafer (striations). The doping variation originates from th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2201f96b69c48f240088d63c85b59e5
https://doi.org/10.1002/pssr.201004115
https://doi.org/10.1002/pssr.201004115
Autor:
Ralf B. Wehrspohn, Torsten M. Geppert, Armin Lambrecht, Stefan L. Schweizer, Daniel Pergande, Susanne Moretton, Benjamin Gesemann
Publikováno v:
SPIE Proceedings.
Periodic silicon nanostructures can be used for different kinds of gas sensors depending on the analyte concentration. First we present an optical gas sensor based on the classical non-dispersive infrared technique for ppm-concentration using ultra-c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a54c50237b83b390e6408f467d3b6d2
https://doi.org/10.1117/12.904994
https://doi.org/10.1117/12.904994
