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Autor:
Torres, Sindry, Frattini, Giuliano, Silva, Leonel I., Repetto, Carlos E., Aguirre, Alejo, Gómez, Bernardo J., Dobry, Ariel
Publikováno v:
In Materials Chemistry and Physics 1 August 2024 322
Autor:
Frattini, Giuliano, Torres, Sindry, Silva, Leonel I, Repetto, Carlos E, Gómez, Bernardo J, Dobry, Ariel
We have studied the effect of nitriding on the humidity sensing properties of hydrogenated amorphous carbon (a-C:H) films. The films were prepared in two stages combining the techniques of physical deposition in vapor phase evaporation (PAPVD) and pl
Externí odkaz:
http://arxiv.org/abs/2102.11661