Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Toralf Gruner"'
Autor:
Laurens de Winter, Timur Tudorovskiy, Jan van Schoot, Kars Troost, Erwin Stinstra, Stephen Hsu, Toralf Gruner, Juergen Mueller, Ruediger Mack, Bartosz Bilski, Joerg Zimmermann, Paul Graeupner
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Autor:
Laurens de Winter, Timur Tudorovskiy, Joerg Zimmermann, Erwin Stinstra, Bartosz Bilski, Jan van Schoot, Kars Zeger Troost, Stephen Hsu, Toralf Gruner, Ruediger Mack, Paul Graeupner, Juergen Mueller
Publikováno v:
Extreme Ultraviolet Lithography 2020.
The high NA=0.55 EUV scanner has an obscuration in the pupil. This has led to the choice to expand the aberration wave-front not in Zernikes anymore, but in other, orthogonal, basis-functions instead. The reasons for this choice and the description o
Autor:
Toralf Gruner, Dirk-Gunnar Welsch
Publikováno v:
Optics Communications. 134:447-454
Using a recently developed formalism of quantization of radiation in the presence of absorbing dielectric bodies, the problem of photon tunneling through absorbing barriers is studied. The multilayer barriers are described in terms of multistep compl
Autor:
Peter Engblom, Jo Finders, Toralf Gruner, Marcel Hendrikus Maria Beems, Jan Mulkens, Youping Zhang, Hans Bakker, Thijs Hollink, Rob Willekers, Alena Andryzhyieuskaya, Angelique Nachtwein, Frank Staals
Publikováno v:
SPIE Proceedings.
In this paper we describe the basic principle of FlexWave, a new high resolution wavefront manipulator, and discuss experimental data on imaging, focus and overlay. For this we integrated the FlexWave module in a 1.35 NA immersion scanner. With FlexW
Autor:
Theo Modderman, Stephane Dana, Birgit Mecking, Herman Boom, Timothy O'Neil, Jan Mulkens, Tammo Uitterdijk, Hans Jasper, Martin Brunotte, Harry Sewell, Toralf Gruner
Publikováno v:
SPIE Proceedings.
This paper presents the progress of the 157 nm lithography program at ASML and Carl Zeiss SMT in 2003. The major technical problems are solved and the first full field 157 nm scanner was shipped to the industry for starting the process development. T
Autor:
Dirk-Gunnar Welsch, Toralf Gruner
Interference of single-photon wave packets at a beam splitter usually leads to an anticorrelation of the light intensity in the two output ports of the beam splitter. The effect may be regarded as ``bunching'' of the photons at the beam splitter and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f28435549878829ba1eeed473aedb46e
Autor:
D.-G. Welsch, Toralf Gruner
Publikováno v:
Quantum Field Theory Under the Influence of External Conditions ISBN: 9783663012054
The use of instruments in optical experiments needs careful examination with regard to their action on the quantum statistics of radiation. Instruments that respond linearly to radiation may be regarded as spatially structured dielectrics whose prese
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12b9d06a79758f157d7761f1894942d7
https://doi.org/10.1007/978-3-663-01204-7_48
https://doi.org/10.1007/978-3-663-01204-7_48