Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Top-coat patterning"'
Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers
Autor:
Xavier Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana, Philippe Bézard, Matthieu Sérégé, Camille Petit-Etienne, Guillaume Gay, Gilles Cunge, Benjamin Cabannes-Boué, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Marcus Müller, Georges Hadziioannou, Ilias Iliopoulos, Guillaume Fleury, Marc Zelsmann
Publikováno v:
ACS Applied Materials & Interfaces
ACS Applied Materials & Interfaces, Washington, D.C. : American Chemical Society, 2021, 13 (9), pp.11224-11236. ⟨10.1021/acsami.1c00694⟩
ACS Applied Materials & Interfaces, 2021, 13 (9), pp.11224-11236. ⟨10.1021/acsami.1c00694⟩
ACS Applied Materials & Interfaces, Washington, D.C. : American Chemical Society, 2021, 13 (9), pp.11224-11236. ⟨10.1021/acsami.1c00694⟩
ACS Applied Materials & Interfaces, 2021, 13 (9), pp.11224-11236. ⟨10.1021/acsami.1c00694⟩
International audience; The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful method for the manufacture of high-resolution features. Critical issues remain to be addressed for successful implementation of DSA, such as dewetting a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2b16affd0d5064adbdf8817fa01fd1fd
https://hal.archives-ouvertes.fr/hal-03419558
https://hal.archives-ouvertes.fr/hal-03419558
Autor:
Xavier Chevalier, Cindy Gomes Correia, Gwenaelle Pound-Lana, Philippe Bézard, Matthieu Sérégé, Camille Petit-Etienne, Guillaume Gay, Gilles Cunge, Benjamin Cabannes-Boué, Célia Nicolet, Christophe Navarro, Ian Cayrefourcq, Marcus Müller, Georges Hadziioannou, Ilias Iliopoulos, Guillaume Fleury, Marc Zelsmann
Publikováno v:
Journal of Photopolymer Science and Technology
Journal of Photopolymer Science and Technology, 2021, 34 (1), pp.11-16. ⟨10.2494/photopolymer.34.11⟩
Journal of Photopolymer Science and Technology, Technical Assoc of Photopolymers Japan, 2021, 34 (1), pp.11-16. ⟨10.2494/photopolymer.34.11⟩
Journal of Photopolymer Science and Technology, 2021, 34 (1), pp.11-16. ⟨10.2494/photopolymer.34.11⟩
Journal of Photopolymer Science and Technology, Technical Assoc of Photopolymers Japan, 2021, 34 (1), pp.11-16. ⟨10.2494/photopolymer.34.11⟩
International audience; A concept of patternable top-coats dedicated to directed self-assembly of high-χ block copolymers is detailed, where the design enables a crosslinking reaction triggered by thermal or photo-activation. Nanostructured BCP area
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::40781ead33c0c2cb8a3af62efadb4064
https://hal.univ-grenoble-alpes.fr/hal-03448382
https://hal.univ-grenoble-alpes.fr/hal-03448382
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Akademický článek
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