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Publikováno v:
Integrated Ferroelectrics. 38:289-295
High dielectric constant Ba0.96Ca0.04Ti0.84Zr0.16O3 (BCTZ) thin films were deposited on Pt/Ti/SiO2/Si substrates by spin on metal-organic decomposition (MOD) technique. Undoped and 0.4% Mg-doped BCTZ thin films were annealed in the temperature range