Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Tomoyuki Oishi"'
Autor:
Takayuki Katsunuma, Tomoyuki Oishi, Akihiro Tsuji, Masahiro Tabata, Ogawa Shuhei, Toru Hisamatsu, Masanobu Honda, Yoshihide Kihara
Publikováno v:
ECS Transactions. 75:3-10
In recent years, the progression of very large scale integration of semiconductor devices and miniaturization require extension of ultra-high selectivity process and CD control technique exhibiting atomic-layer-level control. We introduce herein a st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d867e3b1d684a360391a87564c5e94e3
https://doi.org/10.1149/07506.0003ecst
https://doi.org/10.1149/07506.0003ecst
