Zobrazeno 1 - 10
of 278
pro vyhledávání: '"Tomoyoshi Mishima"'
Publikováno v:
Journal of the Society of Materials Science, Japan. 71:819-823
Publikováno v:
Materials Science Forum. 1062:3-7
Impurity incorporation during vapor-phase epitaxy on stepped surfaces was modeled by classifying rate-limiting processes into i) surface diffusion, ii) step kinetics, and iii) segregation. Examples were shown for i) desorption-limited Al incorporatio
Autor:
Hiroki Imabayashi, Yuto Yasui, Fumimasa Horikiri, Yoshinobu Narita, Noboru Fukuhara, Tomoyoshi Mishima, Kenji Shiojima
Publikováno v:
Japanese Journal of Applied Physics. 62:SA1012
We applied scanning internal photoemission microscopy (SIPM) to clarify the electrical characteristics on the electrode periphery of Ni/n-GaN Schottky contacts. Two types of Schottky contacts with different electrode formation methods were prepared.
Publikováno v:
Japanese Journal of Applied Physics. 61:110902
To apply channeled-ion implantation to cost-effective multi-epitaxial growth for 4H-SiC superjunction devices, we re-evaluated the Al-ion energy (E) dependence of the electronic stopping cross section (S e) in 4H-SiC based on the recently reported se
Autor:
Tomoyoshi Mishima, Kazuhiro Mochizuki
Publikováno v:
Japanese Journal of Applied Physics. 61:118002
Based on the Burton–Cabrera–Frank (BCF) and Cabrera–Levine theories, supersaturation at steps (σ step) during chemical vapor deposition of 4H-SiC (0001̄) at 1570 °C under the condition of C/Si ratio of unity was estimated from the reported g
Publikováno v:
IEEJ Transactions on Electrical and Electronic Engineering. 17:1375-1376
Autor:
Yoshinobu Narita, Naomi Asai, Takehiro Yoshida, Tomoyoshi Mishima, Noboru Fukuhara, Hiroshi Ohta, Fumimasa Horikiri, Kazuki Miwa, Masachika Toguchi, Taketomo Sato
Publikováno v:
IEEE transactions on semiconductor manufacturing. 32(4):489-495
Photoelectrochemical (PEC) etching was used to fabricate deep trench structures in GaN-on-GaN epilayers grown on n-GaN substrates. The width of the side etching was less than $1~\mu \text{m}$ , with high accuracy. The aspect ratio (depth/width) of a
Publikováno v:
Japanese Journal of Applied Physics. 61:088005
Anode-size-independent forward current–density/voltage (V) characteristics of circular GaN p+n diodes were extracted (in the V range of 2.7−3.0 V) from measured ones by an estimation technique of the effective anode radius, followed by the least-
Autor:
Tomoyoshi Mishima, Kazuhiro Mochizuki
Publikováno v:
Japanese Journal of Applied Physics. 61:078003
Reported experimental results on homoepitaxially grown nitrogen-doped 4H-SiC on (03 3 ¯ 8) and misoriented (0001) substrates under carbon-rich conditions in a SiH4–C3H8–N2–H2 system were analyzed according to surface diffusion theory dealing w