Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Tomotaka Yamada"'
Autor:
Tomotaka Yamada, Katsumi Ohmori, Kensuke Matsuzawa, Daisuke Kawana, Shogo Matsumaru, Fujii Tatsuya, Yoshitaka Komuro
Publikováno v:
Journal of Photopolymer Science and Technology. 29:489-493
Autor:
Tomotaka Yamada, Katsumi Ohmori, Takehiro Seshimo, Tsuyoshi Kurosawa, Tasuku Matsumiya, Hitoshi Yamano, Ken Miyagi
Publikováno v:
SPIE Proceedings.
Directed self-assembly (DSA) of block copolymers (BCPs) with conventional lithography is being thought as one of the potential patterning solution for future generation devices manufacturing. New BCP platform is required to obtain resolution below 10
Autor:
Fujii Tatsuya, Shogo Matsumaru, Yoshitaka Komuro, Daisuke Kawana, Katsumi Ohmori, Tomotaka Yamada
Publikováno v:
Extreme Ultraviolet (EUV) Lithography VII.
Extreme Ultra Violet (EUV) lithography is one of the most promising candidate technologies for the high-volume manufacturing (HVM) of semiconductor devices at the sub-14 nm half pitch lines and spaces (LS) pattern for 7 nm node and beyond. EUV resist
Autor:
Koki Yasuda, Tomotaka Yamada, Rio Hosoi, Takayuki Ishikawa, Takamichi Saito, Naoki Takei, Kazushi Takahashi, Ko Takasu
Publikováno v:
AINA
Recently, some commercial websites collect browsing history and device information for use in services they provide. In this paper, we focused on font information that can be obtained via a web browser to determine what kind of software can be identi
Publikováno v:
BWCCA
Many commercial Websites employ Web browser fingerprinting to track visitors using Hypertext Transfer Protocol (HTTP) headers, JavaScript, and other methods. Although a user can disable JavaScript or utilize a prevention tool to avoid being tracked,
Publikováno v:
BWCCA
Web browser fingerprinting is a method currently used to identify a user's device based on the features of the device and a browser. Although this method has been used for Web tracking, its utilization for risk-based authentication or forensics is ex
Publikováno v:
IMIS
Recently, Java Script with HTML5 has become popular for building Website. As a side effect, those technologies can be used to collect a so-called fingerprint that contains hardware information, such as battery status or screen size, of the browser de
High Etch-Resistant Silicon Containing Bilayer Resist:-Lithographic Performance & Outgassing Studies
Autor:
Eric Scott Moyer, Takahashi Hosono, Daisuke Kawana, Kazufumi Sato, Sunlin Hu, Sina Maghoodi, David Lee Wyman, Tomotaka Yamada, Ronald E. Tecklenburg
Publikováno v:
Journal of Photopolymer Science and Technology. 18:365-372
Highly etch resistant poly(silsesquioxane) based resists for ArF lithographic application have been developed. This paper reports on the development of a high etch resistant, high glass transition temperature bilayer resist system capable of imaging