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Autor:
Tomoki KITAZUME, Yuki SHIMIZU
Publikováno v:
Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 18, Iss 4, Pp JAMDSM0036-JAMDSM0036 (2024)
An investigation is carried out through experiments and numerical calculations for the improvement of the resolution of measuring the pitch deviation of a diffraction scale grating with the diffracted beams. Since the changes in angles of diffraction
Externí odkaz:
https://doaj.org/article/824fab95fbaa45118eec1c8ecd6f654a
